By laser ablation with an excimer laser (308 nm) cuprate films from a Ca2Ba2CuaOz sintered bulk target were deposited onto SrTiO3 (100) single crystal substrates. Thallium was added by a diffusion process by simultaneously annealing of the cuprate films together with a sintered T12Ca2Ba2Cua01o bulk sample both enclosed in a covered metal box; this film production method allowed to reduce the contamination by thallium. Scanning electron micrographs of the film surface show crystalline structures, i.e. a network of needle shaped crystallites laying in the film plane. For comparison, Nd:YAG laser produced films show rough surfaces consisting of clusters of grains.Thin films of T1-Ca-Ba-Cu-O compounds have been produced by several groups using electron beam evaporation [1] and sputtering techniques [2][3][4]. The use of thallium leads, however, to contamination of the film deposition system. This has been partially avoided by a film preparation procedure [5]: First, a Ca-Ba-Cu-O film was prepared by sputtering, then, by a heat treatment, thallium was diffused into the film from a metallic piece of thallium. Films with T~ =° values of 75 K were obtained by this technique [5]. We have recently developed a technique [6] where thallium was brought into the film by a diffusion technique, too; a Nd:YAG laser was used for preparation of the Ca-Ba-Cu-O film. In the work described here we have used an excimer laser, thus reaching a largely improved film quality.The film deposition system [7] consisted of a vacuum chamber with a base pressure of 5 x 10 -8 Torr. The excimer laser beam (308 nm, pulse duration 40 ns, pulse energy 450 m J) was directed by a quartz optic into the vacuum chamber and focused onto a rotating Ca2Ba2CuaOx sintered bulk target. The energy density on the target was about 10 J/cm 2. The SrTiO3 (100) single crystal substrates were heated to 400°C during the deposition procedure. To obtain structurized films a mask could be aligned in front of the substrate. Bridgelike structures could be easily obtained and were used for bolometric applications in optical response measurements.In the next preparation step the film was loaded with thallium by a diffusion procedure: A standard 0921-4534/89/$03.50 © Elsevier Science Publishers B.V. (North-Holland) Tl2Ca2Ba2CuaOao bulk sample was placed upon the film, a stainless steel ring was used as a spacer between film and bulk sample. The whole arrangement was placed into a small covered stainless steel box, and was heated for about 5 min in a preheated furnace to 880°C, then taken off and cooled to room temperature.