Preparation of tubular TiO2/Al2O3 composite membranes and their performance in electrofiltration of oxide-CMP wastewater

Preparation of carbon fibers/carbon/alumina tubular composite membranes and their applications in treating Cu-CMP wastewater by a novel electrochemical process: Part 2

“…For determinations of which factors would have the main effects, the analysis of variance (ANOVA) and analysis of the S/N ratio response graph have to be performed for the derived S/N ratios (i.e., total effect, TE) obtained from the experimental results based on the Taguchi experimental design [32]. Results of previous studies [3,[22][23][24][25][26]28] revealed that a higher applied electric field strength would result in a greater permeate flux. In this work the critical electric field strength (CEFS) determined in the preliminary experiments was selected as the first (lowest) level for the electric field strength in Table 2 (i.e., 30 V/cm).…”

“…The resulting wastewater stream of this kind poses further threats to the receiving water bodies if it is not properly treated. Many treatment methods for Cu-CMP wastewater have been developed and/or tested [13][14][15][16][17][18][19][20][21][22][23][24][25][26]. Details can be found in Part 1 of this study [3].…”

Preparation of carbon fibers/carbon/alumina tubular composite membranes and their applications in treating Cu-CMP wastewater by a novel electrochemical process

“…Among various technologies mentioned above, coagulation, electrocoagulation, and filtration were found to be effective in removing the suspended solids and copper from Cu-CMP wastewater. Previous studies [4,7,30,31] have demonstrated that crossflow electrofiltration could effectively reduce the formation of filter cake and increase the flux of filtrate. Therefore, a simultaneously electrocoagulation/electrofiltration (EC/EF) method was developed by the principal investigator of the present study [32].…”

“…The substrates can be prepared by several methods such as extrusion, slip-casting and isostatic pressing [1,2]. On the other hand, the membrane layers can be prepared by sol-gel/slip-casting process [3][4][5][6][7], chemical vapor deposition (CVD) process [8][9][10], and others [3,11]. Of which, some investigators [8,10] have focused on developing CVD techniques using hydrocarbon precursors to coat carbon layers on the substrates and the characteristics of carbon layers such as the adsorption of dissolved organics, electrical conductivity and pore size reduction were discussed.…”

Performance evaluation of a simultaneous electrocoagulation and electrofiltration module for the treatment of Cu-CMP and oxide-CMP wastewaters

“…In the literature CMP wastewaters (mainly oxide-CMP wastewater) has been treated in different manners: (1) to dilute with other process water in the fab [1], (2) to treat by chemical coagulation and precipitation [14], (3) to treat by membrane filtration [2], (4) to treat by electrocoagulation [15], (5) to treat by crossflow electrocoagulation/electrodecantation [16], (6) to treat by dissolved air flotation [17], (7) to treat by crossflow electromembrane filtration [18][19][20], (8) to treat by electrocoagulation/electroflotation [21], and (9) to treat by crossflow electrofiltration/electrodialysis process [22]. Recently, the treatment of CMP wastewater became much critical since the Cu-CMP process has moved into production of wafer.…”