2014
DOI: 10.7567/jjap.53.05fb17
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Preparation of yttrium iron garnet thin films by mist chemical vapor deposition method and their magneto-optical properties

Abstract: Polycrystalline and epitaxial thin films composed of a single phase of yttrium iron garnet (YIG) have been synthesized on silica glass and singlecrystalline gadolinium gallium garnet substrates, respectively, by the mist chemical vapor deposition (CVD) method. The element Y can be found in the deposited thin films only when an aprotic polar solvent such as acetone is employed for the preparation of the precursor solutions. The crystal structure, magnetic properties, and magneto-optical properties of the thin f… Show more

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Cited by 10 publications
(7 citation statements)
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“…15,16) In the previous study, we successfully synthesized YIG thin film, a prototype of garnet-type ferrite as described above, by using the mist CVD method. 17) We could obtain dense and homogeneous thin films with excellent magnetic and magneto-optical properties, suggesting that the mist CVD method is also effective for obtaining high quality thin films of multiple oxides. Besides, the mist CVD process has advantages of high deposition rate and small fluctuation in composition.…”
Section: Introductionmentioning
confidence: 87%
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“…15,16) In the previous study, we successfully synthesized YIG thin film, a prototype of garnet-type ferrite as described above, by using the mist CVD method. 17) We could obtain dense and homogeneous thin films with excellent magnetic and magneto-optical properties, suggesting that the mist CVD method is also effective for obtaining high quality thin films of multiple oxides. Besides, the mist CVD process has advantages of high deposition rate and small fluctuation in composition.…”
Section: Introductionmentioning
confidence: 87%
“…35,36) For the present thin film, the magnetization reaches about 1620 G. Similarly to MOD method, the mist CVD method is thought to suppress the formation of oxygen vacancies because the reaction proceeds in air, and consequently, all the Fe ions present as the trivalent state, as demonstrated by the XPS data, leading to the high value of M S . 17) Not only the magnetization but optical absorption is an important factor to evaluate the practical performance of magneto-optical materials such as BIG. The optical transmittance spectrum of the epitaxial BIG thin film 230 nm thick is given as open circles in Fig.…”
Section: Magnetic Optical and Magneto-optical Propertiesmentioning
confidence: 99%
“…Thus, methanol was chosen as the most appropriate solvent. Note that this choice was different from that in the earlier work of Yao et al 23) The temperature dependence of the film thickness is plotted in Fig. 1.…”
Section: Resultsmentioning
confidence: 99%
“…[17][18][19][20][21][22] Yao et al previously grew YIG thin films by mist CVD. 23) They found that the [Y]=[Fe] ratio in the solution was 1.5, while that in thin films was 0.6. However, this large difference in the [Y]=[Fe] ratio between the solution and the thin films was not discussed in detail, and only the activation energy difference of yttrium and iron was provided.…”
Section: Introductionmentioning
confidence: 99%
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