“…The maximum relative expanded uncertainty U r of density with a confidence level of 0.95 was estimated to be 0.0022, 0.0037, and 0.0027 for TEOS, TPOS, and TBOS, respectively. The methods underlying these calculations have been detailed in a previous work . Briefly, the combined standard uncertainty of the experimental density determined in this work was calculated according to the following equation where u ρ , u P , and u T are the standard uncertainties of density, pressure, and temperature, respectively, and (∂ρ/∂ P ) and (∂ρ/∂ T ) indicate the sensitivity coefficients for the density.…”