Preventing Nanoscale Wear of Atomic Force Microscopy Tips Through the Use of Monolithic Ultrananocrystalline Diamond Probes

Liu, J.; Grierson, David S.; Moldovan, N.; Notbohm, Jacob; Li, S.; Jaroenapibal, Papot; O’Connor, Stephen S.; Sumant, Anirudha V.; Neelakantan, N.; Carlisle, John A.; Turner, Kevin T.; Carpick, Robert W.

doi:10.1002/smll.200901673

Cited by 94 publications

(84 citation statements)

References 63 publications

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“…This includes coatings for high-performance tools 4 , hard-disks 5,6 , microelectromechanical systems (MEMS) 7 , automotive and aerospace components 8,9 , and atomic force microscope probes 10 .…”

Section: Introductionmentioning

confidence: 99%

Quantitative Evaluation of the Carbon Hybridization State by Near Edge X-ray Absorption Fine Structure Spectroscopy

2016

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The characterization of the local bonding configuration of carbon in carbon-based materials is of paramount importance since the properties of such materials strongly depend on the distribution of carbon hybridization states, the local ordering, and the degree of hydrogenation. Carbon 1s near edge X-ray absorption fine structure (NEXAFS) spectroscopy is one of the most powerful techniques for gaining insights into the bonding configuration of near-surface carbon atoms. The common methodology for quantitatively evaluating the carbon hybridization state using C1s NEXAFS measurements, which is based on the analysis of the sample of interest and of a highly ordered pyrolytic graphite (HOPG) reference sample, was reviewed and critically assessed, noting that inconsistencies are found in the literature in applying this method. A theoretical rationale for the specific experimental conditions to be used for the acquisition of HOPG reference spectra is presented together with the potential sources of uncertainty and errors in the correctly computed fraction of sp 2 -bonded carbon. This provides a specific method for analyzing the distribution of carbon hybridization state using NEXAFS spectroscopy. As an illustrative example, a hydrogenated amorphous carbon film was analyzed using this method, and showed good agreement with X-ray photoelectron spectroscopy (which is surface sensitive).Furthermore, the results were consistent with analysis from Raman spectroscopy (which is not surface sensitive), indicating the absence of a structurally different near-surface region in this particular thin film material. The present work can assist surface scientists in the analysis of NEXAFS spectra for the accurate characterization of the structure of carbon-based materials.3

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Section: Introductionmentioning

confidence: 99%

Quantitative Evaluation of the Carbon Hybridization State by Near Edge X-ray Absorption Fine Structure Spectroscopy

2016

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“…Several over-coated nanodevices have been proposed to mitigate conductive tip coating, including platinum silicide tips [10], silicon dioxide tip encapsulation [11], silicon carbide tips [12] and diamond or diamond-like carbon tips [13,14]. However, noble metal-coated conductive tips exhibit disadvantages, narrow potential window or electrode fouling when applied in electrochemical nanodevices [15].…”

Section: Introductionmentioning

confidence: 99%

Fabrication and characterization of boron-doped nanocrystalline diamond-coated MEMS probes

et al. 2016

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Fabrication processes of thin boron-doped nanocrystalline diamond (B-NCD) films on silicon-based micro-and nano-electromechanical structures have been investigated. B-NCD films were deposited using microwave plasma assisted chemical vapour deposition method. The variation in B-NCD morphology, structure and optical parameters was particularly investigated. The use of truncated cone-shaped substrate holder enabled to grow thin fully encapsulated nanocrystalline diamond film with a thickness of approx. 60 nm and RMS roughness of 17 nm. Raman spectra present the typical boron-doped nanocrystalline diamond line recorded at 1148 cm -1 . Moreover, the change in mechanical parameters of silicon cantilevers over-coated with boron-doped diamond films was investigated with laser vibrometer. The increase of resonance to frequency of over-coated cantilever is attributed to the change in spring constant caused by B-NCD coating. Topography and electrical parameters of boron-doped diamond films were investigated by tapping mode AFM and electrical mode of AFM-Kelvin probe force microscopy (KPFM). The crystallite-grain size was recorded at 153 and 238 nm for boron-doped film and undoped, respectively. Based on the contact potential difference data from the KPFM measurements, the work function of diamond layers was estimated. For the undoped diamond films, average CPD of 650 mV and for borondoped layer 155 mV were achieved. Based on CPD values, the values of work functions were calculated as 4.65 and 5.15 eV for doped and undoped diamond film, respectively. Boron doping increases the carrier density and the conductivity of the material and, consequently, the Fermi level.

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“…We resolve worn volumes as small as 25±5 nm 3 , a factor of 10 3 lower than alternative techniques [10,11]. Wear of silicon against diamond is consistent with atomic attrition, and inconsistent with fracture or plastic deformation, which we explicitly rule out by direct imaging.…”

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confidence: 76%

“…Fundamental insights from individual nanoscale contacts are crucial for understanding wear at larger length-scales [2], and for enabling reliable nanoscale devices, manufacturing, and microscopy. Observed nanoscale wear mechanisms include fracture [3] and plastic deformation [4], but recent experiments [5][6][7] and simluations [8] propose another mechanism: wear via atom-by-atom removal ("atomic attrition") modeled using stress-assisted chemical reaction kinetics. Experimental evidence for this has so far been inferential.…”

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confidence: 99%

Nanoscale Wear as a Stress-Assisted Chemical Reaction: An in-situ TEM Study

Carpick

Jacobs

2014

Microsc Microanal

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Wear of sliding contacts leads to energy dissipation and device failure, with massive economic and environmental costs [1]. However, wear phenomena are typically described empirically, since physical and chemical interactions at sliding interfaces are not fully understood at any length-scale. Fundamental insights from individual nanoscale contacts are crucial for understanding wear at larger length-scales [2], and for enabling reliable nanoscale devices, manufacturing, and microscopy. Observed nanoscale wear mechanisms include fracture [3] and plastic deformation [4], but recent experiments [5][6][7] and simluations [8] propose another mechanism: wear via atom-by-atom removal ("atomic attrition") modeled using stress-assisted chemical reaction kinetics. Experimental evidence for this has so far been inferential.Here we quantitatively measure wear of silicon, a material relevant to small-scale devices, using a nanoindentor (Hysitron, Inc.) operated in situ inside a transmission electron microscopy (TEM) [9] (Figure 1). We resolve worn volumes as small as 25±5 nm 3 , a factor of 10 3 lower than alternative techniques [10,11]. Wear of silicon against diamond is consistent with atomic attrition, and inconsistent with fracture or plastic deformation, which we explicitly rule out by direct imaging. The rate of atom removal depends exponentially on stress in the contact, as predicted by chemical rate kinetics [12]. Measured activation parameters are consistent with an atom-by-atom process [13]. These results establish atomic attrition as the primary wear mechanism of silicon at low loads through direct observation [14].

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Preventing Nanoscale Wear of Atomic Force Microscopy Tips Through the Use of Monolithic Ultrananocrystalline Diamond Probes

Cited by 94 publications

References 63 publications

Quantitative Evaluation of the Carbon Hybridization State by Near Edge X-ray Absorption Fine Structure Spectroscopy

Quantitative Evaluation of the Carbon Hybridization State by Near Edge X-ray Absorption Fine Structure Spectroscopy

Fabrication and characterization of boron-doped nanocrystalline diamond-coated MEMS probes

Nanoscale Wear as a Stress-Assisted Chemical Reaction: An in-situ TEM Study

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