Cathodic reduction behavior of the anodic oxide film on titanium has been investigated by using ellipsometry combined with electrochemistry. In acidic sulfate solution, the anodic oxide film reductively dissolves into the solution as Ti(III) ion, resulting in the thinning of its thickness without any significant change of the optical property of the remaining film. In neutral phosphate solutiofi, the anodic oxide film absorbs hydrogen in the hydrogen evolution potential region, resulting in a change of the optical property without thinning its thickness. The amount of hydrogen absorbed per unit volume of the film does not depend on the film thickness but on the cathodic potential. The composition change estimated from measurements of anodJc charge during the hydrogen release process indicates that the hydrogen absorption begins to occur at about -0.25V (vs. RHE) and that the anodic film changes in its composition from TiO~ to TiOOH at -0.9V. The hydrogen absorption induces a decrease of the refractive index and an increase of the extinction index of the anodic film.Titanium is one of the materials exhibiting the high corrosion resistivity caused by formation of a protective oxide film in oxidative environments (1). However, if titanium is placed under cathodic bias conditions or in reductive environments, the oxide film changes in its property because of the hydrogen attack.Under cathodic bias conditions, hydrogen is absorbed into the titanium metal through a modified oxide film layer, resulting in hydrogen brittleness. Fukuzuka et al.(2) have pointed out that the oxide film formed by air oxidation at elevated temperatures acts as a barrier against the hydrogen absorption into the titanium metal but that the oxide film anodically formed loses its barrier property during cathodic reduction in a time period shorter than that of the air oxidation film. Dyer et al. (3) have suggested that hydrogen can be absorbed by the anodie oxide film in the hydrogen evolution potential region and that hydrogen in the oxide film can be reversibly desorbed in the anodic potential region. They observed, using ellipsometry, a significant change of optical property of the films during the electrochemical hydrogen absorption-desorption process. They also observed the electrode impedance response, which changes depending on the cathodic potential (4).For a photoelectrochemical electrode of TiO.,, it has been reported that the electrochemical reduction treatment markedly influences the semiconductive property of the TiO~, resulting in an increase of photoresponse current (5, 6). The hydrogen absorption process of TiO2 has also been discussed from a viewpoint of eleetr~-chromic reactions by Ohzuku et al. (7) and of hydrogen gas detectors by Horrin (8). These results indicate that TiO~ changes its color and electrical conductivity, if hydrogen is absorbed in the TiO2.In this paper, the optical property and composition of the anodic oxide film on titanium during cathodic reduction has been investigated by ellipsometry and eoulomet...