Process for low temperature deposition of strain gauge materials based on Chromium nitride thin films

With the rapid development of modern science and technology, the stability and reliability of electronic components become essential. Low-temperature drift resistors (LTDRs) are of importance owing to their excellent performance and stability in different temperature environments. LTDR technology is now widely used in the industrial field. This paper reviews the research status of LTDRs in order to provide reference for researchers and engineers in related fields. First, the basic principle of LTDRs is briefly discussed. A brief explanation of the mechanism behind low-temperature drift is illustrated. Second, the materials, types, and manufacturing processes of LTDRs are classified and discussed. The review ends with a brief conclusion concerning the challenges from mechanism to application and the future outlook.

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Peizoresistive MEMS Cantilever based CO2 Gas Sensor

Subhashini¹,

Juliet²

2012

IJCA

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A study about the piezoresistive Micro-Electro-Mechanical Systems (MEMS) cantilever for a chemical sensitive -mass based sensor has been carried out to enhance sensor sensitivity. The sensitive region attracts the CO2 molecules there by introducing the stress concentration region (SCR). Three types of SCR geometry designs were first analysed using Intellisuite software to study the effect of stress and its distribution when varying mass is applied at the SCR. The results showed that the rectangular SCR design has the highest stress and showed a linear relation too when compared to the other types. Then, the length of rectangular SCR is varied to study the stress distribution along the cantilever. The piezoresistive element was then placed at various positions to obtain the highest stress resulting due to the deflection of the cantilever. The impact due the SCR was also analysed. The testing results of this piezoresistive MEMS cantilever with rectangular SCR had successfully enhanced sensitivity compared to the piezoresistive MEMS cantilever without SCR when varying mass is applied. Therefore this SCR approach appears to be suitable for enhancing the sensitivity of a massbased piezoresistive MEMS cantilever sensor. General Terms CO2 Gas Sensor using MEMS

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Process for low temperature deposition of strain gauge materials based on Chromium nitride thin films

Cited by 3 publications

References 10 publications

Large Transverse Sensitivity and Force Sensor Application of Strain Sensitive Cr-N Thin Films

Large Transverse Sensitivity and Force Sensor Application of Strain Sensitive Cr-N Thin Films

Recent Status and Prospects of Low-Temperature Drift Resistors

Peizoresistive MEMS Cantilever based CO2 Gas Sensor

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