Process metallurgy for high performance materials at RWTH Aachen/Germany

Friedrich, Bernd; Fuchs, Ralph F.; Kräutlein, C.; Lochbichler, Claus; Lützerath, A.; Milke, E.; Stoephasius, J. C.

doi:10.1007/bf03165336

Cited by 1 publication

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“…The Mg 65 Cu 25 Gd 10 alloy is a first approach to evaluate a target system based on a lanthanide but with optimized chemical properties, in particular a reduced melting point. Compared to pure Gd, which has a melting point of T m = 1312 °C, the one of the alloy at T m < 500 °C [24] enables the option to get a liquid target to load droplet generators or liquid wetted carrier systems. A Mg 65 Cu 25 Gd 10 alloy has been fabricated at Mimitech-Metallurgical Innovations and Materials for Industrial Technology Improvement, Aachen, Germany.…”

Section: Target Materialsmentioning

confidence: 99%

Target materials for efficient plasma-based extreme ultraviolet sources in the range of 6 to 8 nm

Wezyk

Андрианов

Wilhein

et al. 2019

J. Phys. D: Appl. Phys.

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In a comparative study the extreme ultraviolet (XUV) emission of laser-produced plasmas (LPP) of gadolinium (Gd), terbium (Tb), aluminum (Al), magnesium (Mg) and a magnesium–copper–gadolinium alloy (Mg65–Cu25–Gd10) targets is investigated in order to benchmark the emission potential at a wavelength of around 6.7 nm. Compared to the Gd/Tb targets, the advantage of the alloy is a reduced melting point of T m < 500 °C which leads to the option of a liquid or droplet target system as is usually used for a regenerative target concept. Theoretical considerations are presented to compare the emission potential of the four targets in direct comparison. Experimental results of the LPP are discussed with respect to the 6.x nm inband energy, which are consistent with the theoretical considerations. It is shown that the line radiators Al and Mg seem to be suitable emitters with comparable brightness to Gd- or Tb-based sources. The measured conversion efficiency of the Mg65Cu25Gd10 target reaches 80% of that of the pure Gd LPP although the Gd fraction is only 2% (atom percent).

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Section: Target Materialsmentioning

confidence: 99%