Process Variation-Aware Compact Model of Strip Waveguides for Photonic Circuit Simulation

James, Aneek; Rizzo, Anthony; Wang, Yuyang; Novick, Asher; Wang, Songli; Parsons, Robert; Jang, Kaylx; Hattink, Maarten; Bergman, Keren

doi:10.1109/jlt.2023.3238847

Cited by 8 publications

(3 citation statements)

References 56 publications

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“…From these sweeps, the statistical variation of each resonator's FSR and dispersion were measured and analyzed using the linear regression technique presented in [23]. Seven different micro-resonator designs were measured and analyzed: six micro-disks with radii ranging from 2 µm to 4.5 µm, as well as an ellipsoid MRR with an equivalent radius of ≈ 2.5 µm (Fig.…”

Section: Statistical Characterization Of Fsr Robustnessmentioning

confidence: 99%

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Scaling Comb-Driven Resonator-Based DWDM Silicon Photonic Links to Multi-Tb/s in the Multi-FSR Regime

James¹,

Novick²,

Rizzo³

et al. 2023

Preprint

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The use of chip-based micro-resonator Kerr frequency combs in conjunction with dense wavelength-division multiplexing (DWDM) enables massively parallel intensity-modulated direct-detection (IM-DD) data transmission with low energy consumption. Resonator-based modulators and filters used in such systems can limit the number of usable wavelength channels due to practical constraints on the maximum achievable free spectral range (FSR). In this work, we introduce the design of multi-Tb/s comb-driven resonator-based silicon photonic links by leveraging the multi-FSR regime. We demonstrate the viability of the link architecture with yield estimates that are supported by extensive wafer-scale measurements of 704 micro-resonators fabricated in a commercial complementary metal–oxide–semiconductor (CMOS) foundry. We show that a 2.80 Tb/s link is realizable with a ≥ 6σ yield (~99.999%), and aggregate bandwidths of 3.76 Tb/s and 4.72 Tb/s are possible if yield targets are relaxed (3σ and 1σ respectively). All designs represent a 1.94—3.28× boost to aggregate link bandwidth while maintaining BER ≤ 10−10 performance, with a theoretical bandwidth of 10.51 Tb/s being possible for sufficiently robust resonators. High-speed BER measurements informed co-optimization of data rate and aggressor spacing (λag), limiting any additional loss-based power penalties to off-resonance insertion loss (IL) and routing loss. This work demonstrates that, through the multi-FSR regime, there is a clear path toward Kerr comb-driven ultra-broadband, high bandwidth silicon photonic links that can support next-generation data centers and high performance computers.

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Section: Statistical Characterization Of Fsr Robustnessmentioning

confidence: 99%

“…3 and pessimistically adding it to the expected FSR variation, we expect a nominal 𝜆 ag of 133.33 GHz to accommodate a yield of 6𝜎. This yield estimate is calculated assuming that resonators within the same chip will be highly correlated in their FSR performance [23,27].…”

Section: Aggressor Spacing Reduction Due To Fsr Errormentioning

confidence: 99%

Scaling Comb-Driven Resonator-Based DWDM Silicon Photonic Links to Multi-Tb/s in the Multi-FSR Regime

James¹,

Novick²,

Rizzo³

et al. 2023

Preprint

View full text Add to dashboard Cite

show abstract

“…Process variation mitigation At the device level, we leverage the principles of fabrication-robust multi-mode waveguides 71 to construct the RAMZIs almost entirely using adiabatic Euler bends to maintain single-mode operation and reduce the impact of etch bias and sidewall roughness. [72][73][74] The improved fabrication stationarity directly and positively impacts both expected yield and thermal tuning requirements by reducing the uncertainty in waveguide group index, n g (Fig. 7c).…”

Section: Process and Thermal Variation Awarenessmentioning

confidence: 99%

Scalable architecture for sub-pJ/b multi-Tbps comb-driven DWDM silicon photonic transceiver

Wang

Novick

Parsons

et al. 2023

Next-Generation Optical Communication: Components, Sub-Systems, and Systems XII

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The explosive growth of data-centric artificial intelligence applications calls for the next generation of optical interconnects for future hyperscale data centers and high-performance computing (HPC) systems. To unleash the full potential of dense wavelength-division multiplexing, we present the design and exploration of a novel transceiver architecture based on silicon photonic micro-resonators featuring a broadband Kerr frequency comb source and fabrication-robust (de-)interleaving structures. In contrast to the traditional single-bus architecture, our architecture de-interleaves the comb onto multiple buses before traversing separate banks of cascaded resonant modulators/filters, effectively doubling the channel spacing with each stage of de-interleaving. With a closed-form free spectral range (FSR) engineering technique guiding the micro-resonator design, the architecture is scalable toward hundreds of parallel channels-spanning much wider than the resonator FSRs-with minimal crosstalk penalty and thermal tuning overhead. This unique architecture, designed with co-packageability in mind, thus enables a multi-Tbps aggregated data rate with moderate per-channel data rates, paving the way for sub-pJ/b ultra-high-bandwidth chip-to-chip connectivity in future data centers and HPC systems.

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Optical and geometric parameter extraction across 300-mm photonic integrated circuit wafers

Butt,

Tyndall,

Pruessner

et al. 2024

APL Photonics

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The precise quantification of a dielectric waveguide core thickness, core width, core refractive index, and cladding refractive index across a wafer is critical for greater consistency and accuracy in photonic circuit fabrication. However, accurate wafer-scale measurements of these parameters have not yet been demonstrated. We have previously described a method for extracting these four parameters simultaneously from silicon nitride waveguides using unbalanced Mach–Zehnder interferometers on a single die. In this work, we show that this technique can be scaled to characterize these photonic parameters across an entire 300 mm wafer. The refractive indices of the core and cladding materials are found with relative standard deviations of the mean of 0.07% and 0.03%, respectively. The core width offset (bias) and thickness are found with relative standard deviations of 0.3% (2.6 nm) and 0.5% (1.1 nm), respectively. The extracted parameter maps suggest a radial variation of material indices and a planar variation of geometric parameters. We verify the extracted parameters by accurately predicting the performance of an unbalanced Mach–Zehnder interferometer and the degeneracy between different modes in straight waveguides.

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Process Variation-Aware Compact Model of Strip Waveguides for Photonic Circuit Simulation

Cited by 8 publications

References 56 publications

Scaling Comb-Driven Resonator-Based DWDM Silicon Photonic Links to Multi-Tb/s in the Multi-FSR Regime

Scaling Comb-Driven Resonator-Based DWDM Silicon Photonic Links to Multi-Tb/s in the Multi-FSR Regime

Scalable architecture for sub-pJ/b multi-Tbps comb-driven DWDM silicon photonic transceiver

Optical and geometric parameter extraction across 300-mm photonic integrated circuit wafers

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