Processing and characterization of Pb(Zr, Ti)O₃films, up to 10 μm thick, produced from a diol sol-gel route

Abstract

A recently developed diol sol-gel route has been modified in order to produce multilayer PbZr 0.53 Ti 0.47 O 3 films on platinized sapphire substrates. Up to 20 depositions of a 1.1 M sol were carried out leading to a final film thickness of 10 mm. A similar thickness could be achieved from 12 coatings of a more concentrated 1.6 M sol. Decomposition and crystallization of the multilayer coatings were performed using a two-stage prefiring sequence, at 350 ± C and 600 ± C, followed by a final firing step at 700 ± C. Ferroelectric remanant polarization increased with increasing film thickness to a value of 40 mC cm 22 for a 10 mm film, with a corresponding coercive field of 30 kV cm 21 ; the relative permittivity of this film was ϳ1000 and the dissipation factor 0.04. The thickness dependence of relative permittivity could be modeled on a simple series capacitor circuit representing the ferroelectric Pb(Zr, Ti)O 3 (PZT) film and low-permittivity interface layers; but other possible contributory factors are also discussed.

Preparation and characterization of multi-coating PZT thick films by sol–gel process

“…However, in recent years, there has been an increased interest in films of greater thickness, e.g. 1-5 mm, for other potential applications such as pyroelectric infrared detectors, piezoelectric actuators and ultrasound transducers [6][7][8][9][10]. Among all the methods of preparing PZT thick films, the sol-gel process is widely applied because of its easy and low cost preparation, homogeneity and good reproducibility.…”

Chemical Solution Deposition Technique of Thin-Film Ceramic Electrolytes for Solid Oxide Fuel Cells

“…Solvent vapor pressure is one important parameter because solvent determines the film thickness and its rigidity. The short-chain alcohols are generally used for thinner film, while the long-chain alcohols are for thicker films [88,89]. Short-chain alcohols have higher tendency to leave film faster because of its higher vapor pressure.…”

“…Critical thickness decreases with the increase in tensile stress. The critical thickness of film can be increased with the use of longer-chain solvents [89]. Another approach to deal with this issue is to increase the adhesion between the substrate and film [29].…”

Fabrication of 1 ㎛ Thickness Lead Zirconium Titanate Films Using Poly(N-vinylpyrrolidone) Added Sol-gel Method

“…The limitation on film thickness for avoiding crack formation is one of the factors restricting the ap-plication of the sol-gel technique to the industrial production of ceramic coatings [11,12].…”