Processing procedures for the realization of fine structured channel arrays and bridging elements by LTCC-Technology

Smetana, Walter; Balluch, Bruno; Stangl, G.; Lüftl, Sigrid; Seidler, Sabine

doi:10.1016/j.microrel.2009.02.023

Cited by 41 publications

(35 citation statements)

References 5 publications

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“…caused by the laser cutting process. One of the drawbacks of laser patterning is that the laser cut vias and channels normally have a tapered shape [12,21].…”

Section: --10--21 7/17mentioning

confidence: 99%

“…be reduced by supporting them with special sacrificial volume materials (SVM). A considerable number of papers reporting of successful application of different types of substances as an SVM: wax [6], carbon/graphite-based layers [3,[7][8][9][10][11], polymers [12,13] and mineral materials [14][15][16]. Application of various sacrificial volume materials for LTCC 3-D microstructuration has been the object of several reviews [11,17,18].…”

Section: Introductionmentioning

confidence: 99%

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Structuration of the low temperature co-fired ceramics (LTCC) using novel sacrificial graphite paste with PVA–propylene glycol–glycerol–water vehicle

Malecha

Maeder

Jacq

et al. 2011

Microelectronics Reliability

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“…caused by the laser cutting process. One of the drawbacks of laser patterning is that the laser cut vias and channels normally have a tapered shape [12,21].…”

Section: --10--21 7/17mentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Structuration of the low temperature co-fired ceramics (LTCC) using novel sacrificial graphite paste with PVA–propylene glycol–glycerol–water vehicle

Malecha

Maeder

Jacq

et al. 2011

Microelectronics Reliability

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“…13 It consequently promotes the integration ability of electronic components, such as sensors, actuators and electrical packaging, in LTCC devices for realizing accurate process control and real-time automation. 14,15 Another advantage of LTCC for making microreactors is that their green tapes appear flexible and can be easily machined to create cavities via milling, 16 embossing, 17 laser cutting, 18 and use of sacrificial materials. 19 Through stacking and laminating these green tapes with cavities in 3D, these stacks can incorporate various embedded or open fluidic structures in the sub-mm scale, such as packed beds, 20 microchannels, 9 heat exchangers 21 and mixers, for desired chemical processes.…”

Section: Introductionmentioning

confidence: 99%

“…Aside from adhesives, chemical solvents are also used for temporary gluing of LTCC green tapes at low pressure and room temperature. 18,25 These solvents are usually some of the organic compositions of LTCC green tapes or thick film materials. Although these methods are proven to achieve sustainable LTCC cavities with very minimal deformation, their process reliability can be a potential issue in integrating thick film materials or electrical vias.…”

Section: Introductionmentioning

confidence: 99%

“…Common SVMs are carbon-based fugitive materials 27,28 which generally burn out from LTCC samples between the debinding and sintering stages. Organic SVMs such as waxes and polymers 18,29 are also used which burn out only during the debinding step. The drawback of using SVMs is the extended firing time, increasing manufacturing costs greatly.…”

Section: Introductionmentioning

confidence: 99%

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Fine structuration of low-temperature co-fired ceramic (LTCC) microreactors

et al. 2015

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The development of microreactors that operate under harsh conditions is always of great interest for many applications. Here we present a microfabrication process based on low-temperature co-fired ceramic (LTCC) technology for producing microreactors which are able to perform chemical processes at elevated temperature (>400°C) and against concentrated harsh chemicals such as sodium hydroxide, sulfuric acid and hydrochloric acid. Various micro-scale cavities and/or fluidic channels were successfully fabricated in these microreactors using a set of combined and optimized LTCC manufacturing processes. Among them, it has been found that laser micromachining and multi-step low-pressure lamination are particularly critical to the fabrication and quality of these microreactors. Demonstration of LTCC microreactors with various embedded fluidic structures is illustrated with a number of examples, including micro-mixers for studies of exothermic reactions, multiple-injection microreactors for ionone production, and high-temperature microreactors for portable hydrogen generation. IntroductionChemical microreactors are a type of meso-scaled reaction systems that have fluidic channels with characteristic dimensions in the sub-millimeter range. By combining process intensification concepts with microfabrication techniques, these microreactors have been rapidly developed to perform liquid/gas phase chemical reactions, particularly the quasiinstantaneous endothermic or exothermic ones.1,2 Ceramic materials in general feature high chemical and thermal stability. Hence they are very preferable to be used as reactor construction materials, especially for reactors involved with high temperature and/or harsh chemical reactions. be used as the embedded fluidic structures (e.g. channels or cavities) get easily damaged in the stacked LTCC tapes by the high lamination temperature and/or pressure, causing sagging, tearing and cracking issues. Several approaches have been proposed so far in order to reduce these deformations and improve the quality of integrated LTCC fluidic structures. One method is using temporary inserts to introduce mechanical supports to the LTCC cavities to avoid deformation and/or sagging during lamination. These inserts, usually solid flexible objects, 23 are removed right after lamination. However, the removal of inserts from the laminate can cause permanent damage to these fluidic structures. Besides, this method is not applicable for fabricating fully embedded fluidic channels. Alternatively, a chemical-assisted lamination process has been proposed that enables low-pressure and/or lowtemperature bonding of LTCC green tapes. Roosen et al. 24used double-sided adhesive tape that contains acrylate adhesives and a polyethylene terephthalate (PET) film to ensure temporary binding of green tapes under a low lamination pressure at ambient temperature. Upon heating (40-60°C), these adhesives, together with the binders in the LTCC green tapes, soften and join the laminates through capillary forces. Aside from adhesives, ...

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Formation of near-surface melt films on glass ceramics due to ultrashort laser pulses

et al. 2020

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Processing procedures for the realization of fine structured channel arrays and bridging elements by LTCC-Technology

Cited by 41 publications

References 5 publications

Structuration of the low temperature co-fired ceramics (LTCC) using novel sacrificial graphite paste with PVA–propylene glycol–glycerol–water vehicle

Structuration of the low temperature co-fired ceramics (LTCC) using novel sacrificial graphite paste with PVA–propylene glycol–glycerol–water vehicle

Fine structuration of low-temperature co-fired ceramic (LTCC) microreactors

Formation of near-surface melt films on glass ceramics due to ultrashort laser pulses

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