Production and Properties of Nanostructured Metal-Oxide Lead Zirconate–Titanate Piezoceramics

Prisedskii, V. V.; Pogibko, V. M.; Полищук, В. С.

doi:10.1007/s11106-014-9553-y

Cited by 2 publications

(1 citation statement)

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“…Many deposition techniques (sputtering, pulsed laser deposition, and sol-gel) were developed to grow PZT thin films [19][20][21][22]. Among them, radio frequency (RF) magnetron sputtering is the most compatible technique with microelectronic fabrication processes.…”

Section: Introductionmentioning

confidence: 99%

The Calcination Temperature Effect on the Phase Formation of the PZT Ceramic: How the same Calcination Temperature, Result in Different Phase’s Formation

Mahdi

Kadri

2021

DDF

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First, the metallic oxides of PbO, TiO2 and ZrO2 were mixed following (2, 1, 1) molar mass respectively. Then 4 samples were separated (S1, S2, S3 and S4). the first one S1 was subjected to calcination treatments at 600, 700 and 800 °C however, the S2 was treated at 700 °C only, the S3 at 800 °C and S4 at 850 °C. The X ray diffraction of the samples reveals important difference in the phases obtained, at 600 °C the quadratic riche phase of PbTiO3 was mainly observed on sample S1, after the treatment at 700 °C and 800°C, the same XRD patterns were obtained with the same peaks positions and the relative intensity. However the S2 revels different pattern from S1 at 700 °C relative to the formation of the Pb(Zr0.75, Ti0.25)O3 Rhombohedral riche phase. The S3 XRD results reveal also different pattern from S1 at 800 °C relative to the formation of Pb (Zr0.58, Ti0.42) O3 near the Morphotropic phase boundary (MPB) and the S4 confirm these finding. Thin films grown from the S1 and S4 used as target in the RF sputtering system, show important difference in the PZT stoichiometry obtained which is relative to Pb (Zr0.44, Ti0.56) located in the quadratic riche phase and Pb (Zr0.52, Ti0.48) O3 near the MPB respectively.

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Section: Introductionmentioning

confidence: 99%