Production of high-precision micro metallic components by electroforming process

Liu, Jian; Hassanin, Hany; Ni, Zhenyu; Yang, Yi; Yang, Gang; Jiang, Kyle

doi:10.1080/10426914.2016.1221092

Cited by 11 publications

(5 citation statements)

References 30 publications

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“…However, chemical etching is more adept at creating nanoscale structures than microscale structures. Electroforming is theoretically possible to generate metallic microstructures with a limitless aspect ratio [24] on a submillimeter scale [25][26][27], but its dependence on a mask mold remains challenging to manufacture, restricting its process flexibility. Nanoimprints can generate ultra-thin metallic nanostructures with a high aspect ratio and could be used as transparent electrodes for organic solar cells [28][29][30].…”

Section: Introductionmentioning

confidence: 99%

Elliptical vibration chiseling: a novel process for texturing ultra-high-aspect-ratio microstructures on the metallic surface

Li,

Zhang,

Zheng

et al. 2024

Int. J. Extrem. Manuf.

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High-aspect-ratio metallic surface microstructures are increasingly demanded in breakthrough applications, such as high-performance heat transfer enhancement and surface plasmon devices. However, the fast and cost-effective fabrication of high-aspect-ratio microstructures on metallic surfaces remains challenging for existing techniques. This study proposes a novel cutting-based process, namely elliptical vibration chiseling (EV-chiseling), for the high-efficiency texturing of surface microstructures with an ultrahigh aspect ratio. Unlike conventional cutting, EV-chiseling superimposes a microscale elliptical vibration on a backward-moving tool. The tool chisels into the material in each vibration cycle to generate an upright chip with a high aspect ratio through material deformation. Thanks to the tool’s backward movement, the chip is left on the material surface to form a microstructure rather than falling off. Since one microstructure is generated in one vibration cycle, the process can be highly efficient using ultrafast (>1 kHz) tool vibration. A finite element analysis model is established to explore the process mechanics of EV-chiseling. Next, a mechanistic model of the microstructured surface generation is developed to describe the microstructures’ aspect ratio dependency on the process parameters. Then, surface texturing tests are performed on copper to verify the efficacy of EV-chiseling. Uniformed micro ribs with a spacing of 1~10 μm and an aspect ratio of 2~5 have been successfully textured on copper. Compared with the conventional EV-cutting that uses a forward-moving tool, EV-chiseling can improve the aspect ratio of textured microstructure by up to 40 times. The experimental results also verify the accuracy of the developed surface generation model of microstructures. Finally, the effects of elliptical trajectory, depth of cut (DoC), tool shape, and tool edge radius on the surface generation of micro ribs have been discussed.

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Section: Introductionmentioning

confidence: 99%

Elliptical vibration chiseling: a novel process for texturing ultra-high-aspect-ratio microstructures on the metallic surface

Li,

Zhang,

Zheng

et al. 2024

Int. J. Extrem. Manuf.

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“…Employing elastic polydimethylsiloxane (PDMS) molds created through soft lithography as microelectroforming molds effectively overcomes the limitations associated with photoresist molds. The PDMS molds can be readily replicated from microstructured masters by soft lithography, offering a cost-effective alternative [26][27][28]. In our previous work, we have achieved the fabrication of metallic microstructures utilizing the microelectroforming method with a silver (Ag)coated PDMS mold.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of high-aspect-ratio metallic microstructures by microelectroforming using silver-coated polydimethylsiloxane molds with controllable wettability

Zhou,

Xie,

Wang

et al. 2024

J. Micromech. Microeng.

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Microelectroforming is a specialized electroplating process to prepare functional metallic microstructures. However, the formability of microelectroforming is usually restricted by the limited mass transfer in high-aspect-ratio microcavities of molds. This paper presents a simple and reliable method utilizing silver (Ag)-coated polydimethylsiloxane (PDMS) molds with controllable wettability to enhance the formability of microelectroforming. The surfaces of these molds exhibited reversible water contact angles ranging from 4° to 151° realized through ultraviolet irradiation and heat treatment. The hydrophilicity of the PDMS molds facilitated liquid-phase mass transfer, contributing to the fabrication of complete and defect-free nickel microstructures with high aspect ratios. Subsequently, the hydrophobic PDMS molds reduced the interfacial adhesion between these molds and nickel microstructures, which was beneficial for perfect demolding. Nickel microstructures with an aspect ratio of 10 can be achieved by using the PDMS molds, which significantly enhance the formability of microelectroforming. This method provides a potential method to prepare high-aspect-ratio metallic microstructures.

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“…PDMS is an insulating material, thus it needs to be conductively treated before microelectroforming. For example, Liu et al [19] prepared nickel microgears using gold-sprayed PDMS molds and Bonnas et al [20] fabricated yttria-stabilized zirconia microparts using graphite-deposited PDMS molds. The problem is that there is a strong interfacial adhesion between the microcomponents and the PDMS molds due to the microscale effect.…”

Section: Introductionmentioning

confidence: 99%

Microelectroforming of freestanding metallic microcomponents using silver-coated poly(dimethylsiloxane) molds

Zhou¹,

Su²,

Li³

2020

J. Micromech. Microeng.

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Microelectroforming is not only a key step of LIGA (Lithographie, Galvanoformung, and Abformung) and LIGA-like techniques, but also a widely used method for fabricating freestanding metallic microcomponents. Currently, the commonly used molds, consisting of photoresist microstructures which are prepared by lithographic techniques and conductive substrates, limit the development of microelectroforming to a certain degree due to their high cost and complicated processing steps. In this paper, a novel low-cost and net-shaped microelectroforming method using silver (Ag)-coated poly(dimethylsiloxane) (PDMS) molds is demonstrated to fabricate freestanding metallic microcomponents. Pristine PDMS molds are first replicated from a microstructured master using soft lithography. Then polydopamine is adhered to the surfaces of the pristine PDMS molds and followed by electroless deposition of Ag nanoparticle coatings. Subsequently, metal atoms are electrodeposited on the Ag-coated PDMS molds to form metallic microcomponents. After microelectroforming, the Ag coatings are peeled off from the molds and adhered to the surfaces of the metallic microcomponents during the demolding process. However, the molds can be repaired repeatedly using electroless deposition of Ag coatings on the polydopamine films, and the Ag coatings adhered to the surfaces of metallic microcomponents can be completely removed by immersion in ammonia water. Therefore, the Ag-coated PDMS molds can be reused several times. The application of this method for fabricating freestanding metallic microcomponents is demonstrated by producing nickel microcomponents. The results show that freestanding nickel microcomponents with precise dimensions and low surface roughnesses can be reliably achieved. We believe that this method has great potential for fabricating metallic microcomponents, microparts, and micropatterns.

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Production of high-precision micro metallic components by electroforming process

Cited by 11 publications

References 30 publications

Elliptical vibration chiseling: a novel process for texturing ultra-high-aspect-ratio microstructures on the metallic surface

Elliptical vibration chiseling: a novel process for texturing ultra-high-aspect-ratio microstructures on the metallic surface

Fabrication of high-aspect-ratio metallic microstructures by microelectroforming using silver-coated polydimethylsiloxane molds with controllable wettability

Microelectroforming of freestanding metallic microcomponents using silver-coated poly(dimethylsiloxane) molds

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