Progress on the magnetic field-assisted finishing of MEMS micropore x-ray optics

Riveros, Raul E.; Tan, Michael A.; Yamaguchi, Hitomi; Mitsuishi, Ikuyuki; Ishizu, Kensuke; Moriyama, Teppei; Ogawa, Tomohiro; Ezoe, Yuichiro; Horade, Mitsuhiro; Saito, Susumu; Kanamori, Yoshiaki; Yamasaki, Noriko Y.; Mitsuda, Kazuhisa

doi:10.1117/12.892978

Cited by 2 publications

(2 citation statements)

References 11 publications

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“…Riveros et al 115– 117 and Yamaguchi et al 118 have emp-loyed MAF to finish a Si MEMS micro-pore X-ray optic. The sidewalls of micro-pore act as X-ray focusing mirrors, but it possess a non-uniform surface texture.…”

Section: Precision Finishing Techniques Used For Fabrication Of Opticmentioning

confidence: 99%

Review of several precision finishing processes for optics manufacturing

Ghosh

Sidpara

Bandyopadhyay

2018

Journal of Micromanufacturing

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The ultrasmooth optical components with atomic-order surface roughness and nanometre-level shape accuracy are in immense demand with the rapid advancement of modern optical technology. In recent years, aspherical and free-form surfaces are gaining more interest for its favorable properties. Moreover, the new optical materials with immensely enhanced mechanical properties are being developed to meet the stringent requirements of modern optics. Fabrication of complex-shaped ultrasmooth optical components becomes a significant challenge as conventional finishing techniques are unable to machine aspherical or free-form surfaces precisely. This situation demands some highly deterministic finishing processes. Mostly, the optical components are fabricated by shaping or pre-finishing methods followed by final finishing processes. In the shaping or pre-finishing methods, the rigid abrasive tools are used to remove the material at an enhanced rate and near net shape of the elements can be attained. Surface finish and shape accuracy can also be improved to some extent. Owing to the presence of residual finishing marks generated by shaping methods, the application of the components is limited to the infrared (IR) optics. Final finishing processes include more deterministic and flexible polishing techniques that can achieve desired surface finish, figure accuracy and surface integrity to make it suitable for shorter wavelength applications. In recent years, single point diamond turning, precision grinding, plasma chemical vaporization machining and magnetorheological fluid-based finishing are widely used for fabricating ultrasmooth optics. In this article, principle, mechanism of material removal and applicability of the aforementioned precision finishing processes to different materials are discussed.

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Section: Precision Finishing Techniques Used For Fabrication Of Opticmentioning

confidence: 99%

Review of several precision finishing processes for optics manufacturing

Ghosh

Sidpara

Bandyopadhyay

2018

Journal of Micromanufacturing

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“…This reduction has been demonstrated in the MEMS miniature optic or mirror chip (7.5×7.5 mm) by adding the magnetic field assisted finishing after the annealing process. 17 Hence, combination of the two finishing processes will enable this extremely high micro roughness comparable with or even better than those of the traditional Xray mirrors. The micro roughness is related to the metal coating that is indispensable for the silicon MEMS X-ray optic.…”

Section: Technology Developmentmentioning

confidence: 99%

Progress with MEMS x-ray micro pore optics

et al. 2012

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Our development of ultra light-weight X-ray micro pore optics based on MEMS (Micro Electro Mechanical System) technologies is described. Using dry etching or X-ray lithography and electroplating, curvilinear sidewalls through a flat wafer are fabricated. Sidewalls vertical to the wafer surface are smoothed by use of high temperature annealing and/or magnetic field assisted finishing to work as X-ray mirrors. The wafer is then deformed to a spherical shape. When two spherical wafers with different radii of curvature are stacked, the combined system will be an approximated Wolter type-I telescope. This method in principle allows high angular resolution and ultra light-weight X-ray micro pore optics. In this paper, performance of a single-stage optic, coating of a heavy metal on sidewalls with atomic layer deposition, and assembly of a Wolter type-I telescope are reported.

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Progress on the magnetic field-assisted finishing of MEMS micropore x-ray optics

Cited by 2 publications

References 11 publications

Review of several precision finishing processes for optics manufacturing

Review of several precision finishing processes for optics manufacturing

Progress with MEMS x-ray micro pore optics

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