The use of adhesives with low gas permeability in packaging microcomponents provides a simple, lowcost alternative to the standard techniques for hermetic packaging. The permeability to helium of various epoxy resin adhesives was determined by means of a mass spectrometer in reference specimens of de®ned dimensions. The adhesive with the lowest permeability to helium was chosen to bond an evacuated LIGA gyrometer package (¯atpack, volume 1.4 cm 3 ). For comparison, a few packages were closed by laser welding. Subsequently, the pressure rise in the sealed packages due to gas permeation and desorption from the walls was measured by the integrated microsensor, and the permeation rate was determined. The permeation rates of as low as 10 )17 m 3 /s achieved in bonded packages are comparable to those measured in laser welded packages.
IntroductionMany applications in microelectronics, micro-optics, and microsensors require hermetically sealed packages either to protect microcomponents from chemical reactions with gases penetrating from the environment [1] or in order to maintain a low overall pressure in an evacuated package, e.g., to eliminate the attenuation by air of movable microcomponents [2].Where standard techniques are used for hermetic sealing, such as glass sealing, soldering, welding [3], anodic or direct bonding [4, 5], a speci®c choice of material is required. These techniques, as a rule, are associated with high process temperatures and high process costs. Adhesives can be employed in packaging technology at low process temperatures and with a large variety of materials [6,7]. Process costs can be reduced also because of the ease of handling.As with standard technologies, the required hermeticity of the package is achieved, on the one hand, by the use of hermetic packaging materials, such as metal, ceramics, and glass. On the other hand, the hermetic tightness of the respective sealing interfaces of the materials so joined is a decisive factor.Modern epoxy resin adhesives have very low gas permeabilities and outgassing rates and, consequently, can be used to join materials for hermetic packages if the package has been designed properly.In this study, the permeability to helium of various epoxy resin adhesives was measured by means of a mass spectrometer in reference specimens of de®ned dimensions, and adhesives were used to seal an evacuated LIGA gyrometer package (¯atpack, volume 1.4 cm 3 ). For comparison, a number of packages were also sealed by laser welding. The overall pressure rise in the sealed packages due to gas permeation and desorption from the walls was measured by the integrated microsensor, and the permeation rate was determined from these readings.