1995
DOI: 10.1016/0257-8972(95)08281-6
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Properties and performance of new metastable Ti-B-C-N hard coatings prepared by magnetron sputtering

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Cited by 46 publications
(23 citation statements)
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“…The hardness of the coatings is lower than for TiC [25], and also lower than in earlier 284 reports on the hardness of Ti-B-C coatings [41,42], and it did not increase with the 285 incorporation of B, which was reported before [1,2,3,4]. This is probably an affect off a 286 larger fraction of soft amorphous matrix in these coatings compared with [41,42].…”
contrasting
confidence: 41%
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“…The hardness of the coatings is lower than for TiC [25], and also lower than in earlier 284 reports on the hardness of Ti-B-C coatings [41,42], and it did not increase with the 285 incorporation of B, which was reported before [1,2,3,4]. This is probably an affect off a 286 larger fraction of soft amorphous matrix in these coatings compared with [41,42].…”
contrasting
confidence: 41%
“…The Ti-B-C ternary 24 phase diagram contains TiC, TiB 2 , and C. Thus, the selection of composition in the 25 composite can give a trade-off between the lubricating amorphous C and probable BC x 26 phase [5] for good mechanical properties [1,2,3,4] and the hard, but also the conductive 27…”
mentioning
confidence: 99%
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“…Ti-B-C-N films have been deposited by chemical vapor deposition (CVD) [7], magnetron sputtering [8][9][10], and electron beam-physical vapor deposition (EB-PVD) [11]. The metastable Ti-B-C-N films were harder than TiB 2 film [11], and displayed excellent tribological properties [8,9].…”
Section: Introductionmentioning
confidence: 99%
“…Ti-B-C-N coating system was one of the promising nanocomposite coating systems exhibiting super hardness, good tribological properties, and high oxidation and corrosion resistance [4][5][6][7][8][9][10][11][12][13][14][15]. Ti-B-C-N coating have been successfully synthesized by chemical vapor deposition (CVD) [4,5], electron beam physical vapor deposition (EB-PVD) [6], and more commonly by dc magnetron sputtering [7][8][9][10][11][12][13][14][15].…”
Section: Introductionmentioning
confidence: 99%