2015
DOI: 10.1134/s1063782615100036
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Properties of AlN films deposited by reactive ion-plasma sputtering

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Cited by 11 publications
(1 citation statement)
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“…Solving a number of technical problems and primarily raising the crystal length and providing a high-quality thermal management made it possible to reach record-breaking power levels, up to 30 W from an aperture of 100 µm [3,4]. Improving the quality of deposition of dielectric mirrors [5][6][7] and using special technologies [8] to protect mirrors from a high electrical and optical power density made it possible to far remove the threshold of their optical damage. Now, the main principles that restrict the power of lasers consist in those physical processes that start to dominate at high thermal, electrical, and optical stresses.…”
Section: Introductionmentioning
confidence: 99%
“…Solving a number of technical problems and primarily raising the crystal length and providing a high-quality thermal management made it possible to reach record-breaking power levels, up to 30 W from an aperture of 100 µm [3,4]. Improving the quality of deposition of dielectric mirrors [5][6][7] and using special technologies [8] to protect mirrors from a high electrical and optical power density made it possible to far remove the threshold of their optical damage. Now, the main principles that restrict the power of lasers consist in those physical processes that start to dominate at high thermal, electrical, and optical stresses.…”
Section: Introductionmentioning
confidence: 99%