Properties of double-layer Al2O3/TiO2 antireflection coatings by liquid phase deposition

Wuu, Dong−Sing; Lin, Chih‐Wei; Chen, Chao-Nan; Lee, Hong-Hsiu; Huang, Jung-Jie

doi:10.1016/j.tsf.2015.01.042

Cited by 34 publications

(11 citation statements)

References 18 publications

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“…This suggests that the antireflection function in the visible range at the Al 2 O 3 /In 2 O 3 heterostructure reinforces its applicability in the field of transparent display panels and other optical devices. 32 Another crucial function of Al 2 O 3 film in addition to the antireflection coating is to passivate the underlying Al 2 O 3 /In 2 O 3 2D conducting channel from reoxidation in air and humidity as maintaining the metallic conduction even in 1 yr air-aging. This is mandatory for practical usefulness of interfacial 2D InO x metallic subphase at the interface (discussed in detail later).…”

Section: Resultsmentioning

confidence: 99%

“…The antireflection function occurs from the threshold In 2 O 3 thickness of 30 nm since In 2 O 3 is crystallized beginning at ∼20 nm of film thickness (Figure S3), where the refractive index of In 2 O 3 bixbyite ( n ≈ 1.9985) is properly formed . Al 2 O 3 is indeed known as the antireflection coating material and its proper thickness of maximum antireflection coating effect can be estimated by the quarter wavelength rule to invoke the destructive interference of the reflected beam expressed as d ARC = λ/4 n ARC , where d ARC is the thickness of the antireflection coating layer, λ is the wavelength of the incident beam, and n ARC is the reflection index of the incident beam . At 500 nm (λ) and 1.69 of n ARC for Al 2 O 3 , d ARC is estimated at 74 nm, which is the middle of the actual Al 2 O 3 thickness range of 50–100 nm used in the heterostructure.…”

Section: Results and Discussionmentioning

confidence: 99%

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Creation of a Short-Range Ordered Two-Dimensional Electron Gas Channel in Al₂O₃/In₂O₃ Interfaces

et al. 2017

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The tuning of electrical properties in oxides via surface and interfacial two-dimensional electron gas (2DEG) channels is of great interest, as they reveal the extraordinary transition from insulating or semiconducting characteristics to metallic conduction or superconductivity enabled by the ballistic transport of spatially confined electrons. However, realizing the practical aspects of this exotic phenomenon toward short-range ordered and air-stable 2DEG channels remains a great challenge. At the heterointerface formed after deposition of an AlO layer on a nanocrystalline InO layer, a dramatic improvement in carrier conduction equivalent to metallic conduction is obtained. A conductivity increase by a factor of 10 times that in raw InO, a sheet resistance of 850 Ω/cm, and a room temperature Hall mobility of 20.5 cm V s are obtained, which are impossible to achieve by tuning each layer individually. The physicochemical origin of metallic conduction is mainly ascribed to the 2D interfacially confined O-vacancies and semimetallic nanocrystalline InO (x < 2) phases by the clustered self-doping effect caused by O-extraction from InO to the AlO phase during ALD. Unlike other submetallic oxides, this 2D channel is air-stable by complete AlO passivation and thereby promises applicability for implementation in devices.

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Section: Resultsmentioning

confidence: 99%

Section: Results and Discussionmentioning

confidence: 99%

Creation of a Short-Range Ordered Two-Dimensional Electron Gas Channel in Al₂O₃/In₂O₃ Interfaces

et al. 2017

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“…Alumina thin films have unique mechanical properties and corrosion resistance; as a result, they have been implemented in many industrial fields such as surface passivation [78], gas diffusion barriers [79], anti-reflection layers [80], etc.…”

Section: Nanocoating and Its Role In Corrosion Preventionmentioning

confidence: 99%

A Review on the Corrosion Behaviour of Nanocoatings on Metallic Substrates

et al. 2019

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Growth in nanocoatings technology is moving towards implementing nanocoatings in many sectors of the industry due to their excellent abilities. Nanocoatings offer numerous advantages, including surface hardness, adhesive strength, long-term and/or high-temperature corrosion resistance, the enhancement of tribological properties, etc. In addition, nanocoatings can be applied in thinner and smoother thickness, which allows flexibility in equipment design, improved efficiency, lower fuel economy, lower carbon footprints, and lower maintenance and operating costs. Nanocoatings are utilised efficiently to reduce the effect of a corrosive environment. A nanocoating is a coating that either has constituents in the nanoscale, or is composed of layers that are less than 100 nm. The fine sizes of nanomaterials and the high density of their ground boundaries enable good adhesion and an excellent physical coverage of the coated surface. Yet, such fine properties might form active sites for corrosion attack. This paper reviews the corrosion behaviour of metallic, ceramic, and nanocomposite coatings on the surface of metallic substrates. It summarises the factors affecting the corrosion of these substrates, as well as the conditions where such coatings provided required protection.

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“…Compared to physical and chemical steam methods, the sol-gel method has many advantages such as being cheaper, easily adaptable to industry scale and mass production, working under normal atmospheric conditions, high purity, ultra-homogeneity, and working at the desired molarity and temperature [9][10][11]. For anti-reflection coatings, highly transparent materials such as SiO2, Si3N4, TiO2, Al2O3, Ta2O5, and SiO2-TiO2 are used for c-Si solar cells [12].…”

Section: Introductionmentioning

confidence: 99%

Silicon dioxide thin films prepared by spin coating for the application of solar cells

Kanmaz

Üzüm

2021

International Advanced Researches and Engineering Journal

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In this study, Silicon Dioxide (SiO2) thin films processed by the spin coating method was studied with prepared solutions. Antireflection coating effect of deposited SiO2 thin films on crystalline silicon substrates was analyzed after optimizing the solution, deposition, and thermal treatment processes. The effect of ethanol dilution of the solution was investigated as well. Spectrophotometer reflectance measurements, Scanning Electron Microscopy (SEM) measurements and Afors-het based simulations were carried out. For the prepared solution based SiO2 thin films, the annealing temperature of 950 °C for 7 min in the air was determined as optimum. The minimum surface reflectance of SiO2 coated silicon surface could be reduced below 10% depending on the applied process. Based on the silicon solar cell device simulations, it was revealed that efficiency of a solar cell could be improved 4.23% more thanks to the antireflection coating effect.

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Properties of double-layer Al2O3/TiO2 antireflection coatings by liquid phase deposition

Cited by 34 publications

References 18 publications

Creation of a Short-Range Ordered Two-Dimensional Electron Gas Channel in Al₂O₃/In₂O₃ Interfaces

Creation of a Short-Range Ordered Two-Dimensional Electron Gas Channel in Al₂O₃/In₂O₃ Interfaces

A Review on the Corrosion Behaviour of Nanocoatings on Metallic Substrates

Silicon dioxide thin films prepared by spin coating for the application of solar cells

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Properties of double-layer Al2O3/TiO2 antireflection coatings by liquid phase deposition

Cited by 34 publications

References 18 publications

Creation of a Short-Range Ordered Two-Dimensional Electron Gas Channel in Al2O3/In2O3 Interfaces

Creation of a Short-Range Ordered Two-Dimensional Electron Gas Channel in Al2O3/In2O3 Interfaces

A Review on the Corrosion Behaviour of Nanocoatings on Metallic Substrates

Silicon dioxide thin films prepared by spin coating for the application of solar cells

Contact Info

Product

Resources

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Creation of a Short-Range Ordered Two-Dimensional Electron Gas Channel in Al₂O₃/In₂O₃ Interfaces

Creation of a Short-Range Ordered Two-Dimensional Electron Gas Channel in Al₂O₃/In₂O₃ Interfaces