2008
DOI: 10.1016/j.solmat.2008.05.010
|View full text |Cite
|
Sign up to set email alerts
|

Properties of fluorine doped ZnO thin films deposited by magnetron sputtering

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

2
24
0

Year Published

2010
2010
2020
2020

Publication Types

Select...
8
2

Relationship

0
10

Authors

Journals

citations
Cited by 105 publications
(26 citation statements)
references
References 24 publications
2
24
0
Order By: Relevance
“…Moreover, the optimal electrical properties obtained here are comparable with some previously reported FZO films prepared by other techniques with high-temperature process on glass substrates [21][22][23][24]. Resistivity is proportional to the reciprocal of carrier concentration and mobility.…”
Section: Resultssupporting
confidence: 87%
“…Moreover, the optimal electrical properties obtained here are comparable with some previously reported FZO films prepared by other techniques with high-temperature process on glass substrates [21][22][23][24]. Resistivity is proportional to the reciprocal of carrier concentration and mobility.…”
Section: Resultssupporting
confidence: 87%
“…10. It shows that the deposit weight increases with an increase in suspension con- The transmission of the sample varied from 78.7 to 83% in the wavelength region of 400-800 nm, and the average transmission was higher than 90% between 450 and 700 nm, which shows an even better optical properties than those measured on samples grown by more sophisticated techniques [22,23]. This indicates an excellent optical transparency in the visible range of light spectrum for the thin film, which is of crucial importance for optoelectronic applications.…”
Section: Effect Of the Suspension Concentrationmentioning
confidence: 90%
“…A variety of techniques, such as chemical vapor deposition [12], atomic layer deposition [13], magnetron sputtering [14], pulsed laser deposition [6] and sol-gel [15] have been applied for the deposition of high quality ZnO films on glass substrate. In addition to the film quality, the preparation of large-area coatings with a cost effective technique is also an upfront challenge in glazing industry [7].…”
Section: Introductionmentioning
confidence: 99%