Properties of SiO 2 and Si 3 N 4 layers deposited by MF twin magnetron sputtering using different target materials

Ruske, M.; Bräuer, Günter; Pistner, Jürgen; Szczyrbowski, J.; Weigert, M

doi:10.1016/s0040-6090(99)00157-1

Cited by 12 publications

(4 citation statements)

References 2 publications

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“…The ZnO:Al films that were used as front contact layers in this paper were deposited in a vertical inline sputter deposition system (VISS 300) by von Ardenne Anlagentechnik, Dresden, Germany. 3.3 mm thick float glass with a size of 10 × 10 cm 2 (type Eurowhite ®® by Euroglas GmbH, Haldensleben, Germany) was used as substrate upon which a 120 nm SiO x N y thin-film was deposited via reactive sputter deposition [41] using a Sispa™ target [42,43]. The SiO x N y -layer served as antireflection coating between the glass and the ZnO:Al and as barrier layer to prevent sodium diffusion from the substrate glass to the zinc oxide interface.…”

Section: Zno:al Front Contactsmentioning

confidence: 99%

Coupling and Trapping of Light in Thin-Film Solar Cells Using Modulated Interface Textures

et al. 2019

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Increasing the efficiency of solar cells relies on light management. This becomes increasingly important for thin-film technologies, but it is also relevant for poorly absorbing semiconductors like silicon. Exemplarily, the performance of a-Si:H/µc-Si:H tandem solar cells strongly depends on the texture of the front and rear contact surfaces. The rear contact interface texture usually results from the front surface texture and the subsequent absorber growth. A well-textured front contact facilitates light-coupling to the solar cell and light-trapping within the device. A variety of differently textured ZnO:Al front contacts were sputter deposited and subsequently texture etched. The optical performance of a-Si:H/µc-Si:H tandem solar cells were evaluated regarding the two effects: light-coupling and light-trapping. A connection between the front contact texture and the two optical effects is demonstrated, specifically, it is shown that both are induced by different texture properties. These findings can be transferred to any solar cell technologies, like copper indium gallium selenide (CIGS) or perovskites, where light management and modifications of surface textures by subsequent film growth have to be considered. A modulated surface texture of the ZnO:Al front contact was realized using two etching steps. Improved light-coupling and light-trapping in silicon thin-film solar cells lead to 12.5% efficiency.

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Section: Zno:al Front Contactsmentioning

confidence: 99%

Coupling and Trapping of Light in Thin-Film Solar Cells Using Modulated Interface Textures

et al. 2019

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“…1,2 Normally, SiO 2 is obtained from mineral sources such as quartzite, but it has been recently found that SiO 2 can also be obtained from bionatural resources such as rice hulls. Normal rice hulls are composed of approximately 80 wt.…”

Section: Introductionmentioning

confidence: 99%

Obtaining high purity silica from rice hulls

Júnior¹,

Cunha²,

Carvalho³

et al. 2010

Quím. Nova

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Recebido em 15/4/09; aceito em 29/10/09; publicado na web em 10/3/10 Many routes for extracting silica from rice hulls are based on direct calcining. These methods, though, often produce silica contaminated with inorganic impurities. This work presents the study of a strategy for obtaining silica from rice hulls with a purity level adequate for applications in electronics. The technique is based on two leaching steps, using respectively aqua regia and Piranha solutions, which extract the organic matrix and inorganic impurities. The material was characterized by Fourier-transform infrared spectroscopy (FTIR), powder x-ray diffraction (XRD), x-ray fluorescence (XRF), scanning electron microscopy (SEM), particle size analysis by laser diffraction (LPSA) and thermal analysis.

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“…O índice de refração de 1,462 (relativo ao SiO 2 ) foi fixado no cálculo da espessura das amostras controles, visto que estes dielétricos são filmes baseados em óxido de silício. Para a obtenção das espessuras das amostras controles da oxinitretação e nitretação, foi usado também o valor do índice de refração do nitreto de silício (Si 3 N 4 ), que apresenta o valor 2,0[21]. No caso dos filmes de Ti, foram utilizados três valores de índices de Devido às dificuldades de se medir filmes com espessuras menores que 10 nm (como já foi citado acima), os valores obtidos encontram-se dentro de um erro de ± 100%.…”

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Isolantes de porta com altas constantes dieletricas (High K) para tecnologia MOS

Miyoshi¹,

Diniz²

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Properties of SiO 2 and Si 3 N 4 layers deposited by MF twin magnetron sputtering using different target materials

Cited by 12 publications

References 2 publications

Coupling and Trapping of Light in Thin-Film Solar Cells Using Modulated Interface Textures

Coupling and Trapping of Light in Thin-Film Solar Cells Using Modulated Interface Textures

Obtaining high purity silica from rice hulls

Isolantes de porta com altas constantes dieletricas (High K) para tecnologia MOS

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