“…However, when the growth orientation deviated from the c-axis [0001], structural defects increased [4], and attaining smooth surface became difficult. Large surface pit is one of themorphological imperfections that frequently encountered in a-plane(1120) GaN growth [5][6][7].It refers to the inverted triangular pyramid pits that bound by one vertical (0001 � ) and two inclined{101 � 1}facets [8]or,in some studies, pentagonal shapes composed of{101 � 2 � }, {202 � 1}, and {112 � 2} facets [9,10]. Reducing the V/III ratio could eliminate these defects; therefore, most researchers considered them as a result of incomplete island coalescence [5,6,[8][9][10][11][12], which was due to the increased vertical growth of the (1120) facet and decreased lateral growth rate of the inclined facets, such as {101 � 1} and (0001 � ) [6,8].…”