2020
DOI: 10.3390/mi11020130
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Proportional Microvalve Using a Unimorph Piezoelectric Microactuator

Abstract: Microvalves are important flow-control devices in many standalone and integrated microfluidic applications. Polydimethylsiloxane (PDMS)-based pneumatic microvalves are commonly used but they generally require large peripheral connections that decrease portability. There are many alternatives found in the literature that use Si-based microvalves, but variants that can throttle even moderate pressures (1 bar) tend to be bulky (cm-range) or consume high power. This paper details the development of a low-power, no… Show more

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Cited by 16 publications
(6 citation statements)
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“…Subsequent developments include: testing the platform inside an incubator, testing a lung-on-a-chip protocol with an OoC device, developing low-power temperature control for the OoC chip, miniaturized flow controllers that cover the full range of OoC applications [33][34][35], and a miniaturized switch valve [36]. Eventually, a library of flow control components and a design simulation software that enables users to design and implement their flow control scheme will accelerate the OoC testing.…”
Section: Discussionmentioning
confidence: 99%
“…Subsequent developments include: testing the platform inside an incubator, testing a lung-on-a-chip protocol with an OoC device, developing low-power temperature control for the OoC chip, miniaturized flow controllers that cover the full range of OoC applications [33][34][35], and a miniaturized switch valve [36]. Eventually, a library of flow control components and a design simulation software that enables users to design and implement their flow control scheme will accelerate the OoC testing.…”
Section: Discussionmentioning
confidence: 99%
“…In the past few years, there have been many different trials involving microvalves within various projects. In 2020, Gunda et al 17 developed a low power, proportionally controlled piezoelectric microvalve. They were able to achieve a device that could work with as high as 1 bar driving pressure with very little leakage (0.8% of the open flow).…”
Section: Introductionmentioning
confidence: 99%
“…It finds extensive applications in Genomics, diagnostics, single cell analysis, micro biology, cell biology, drug discovery, organ-on-a-chip, heavy metal ion detection, purity testing, high throughput genetic screening etc. 1,2,3,4 Microfluidics is a promising and upcoming technology for diagnostics and drug developments. Major advantages of microfluidics are the drastic decrease in chemical reaction time and less consumption of expensive chemical reagents, as well as enhancement of reliability.…”
Section: Introductionmentioning
confidence: 99%