Prospects of ion projection techniques for maskless implantation at high ion energies

Meijer, Jan; Stephan, A.

doi:10.1016/s0168-583x(01)01002-3

Cited by 7 publications

(2 citation statements)

References 18 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…High positioning accuracy can only be achieved using ≈sub‐50 keV kinetic energies, to limit the ion straggling to few tens of nanometers . Sub‐100 nm positioning is highly challenging for general‐purpose accelerators equipped with conventional electromagnetic focusing and scanning systems and it is a demanding task even for keV FIBs, which demonstrated noteworthy results following the development of ad‐hoc experimental setups . FIB systems are sensitive to chromatic aberrations, resulting in a limited number of available ion sources and energies .…”

Section: Deterministic Placement Of Color Centersmentioning

confidence: 99%

Quantum Micro–Nano Devices Fabricated in Diamond by Femtosecond Laser and Ion Irradiation

et al. 2019

View full text Add to dashboard Cite

Diamond has attracted great interest as a quantum technology platform thanks to its optically active nitrogen vacancy (NV) center. The NV's ground state spin can be read out optically, exhibiting long spin coherence times of ≈1 ms even at ambient temperatures. In addition, the energy levels of the NV are sensitive to external fields. These properties make NVs attractive as a scalable platform for efficient nanoscale resolution sensing based on electron spins and for quantum information systems. Diamond photonics enhance optical interactions with NVs, beneficial for both quantum sensing and information. Diamond is also compelling for microfluidic applications due to its outstanding biocompatibility, with sensing functionality provided by NVs. However, it remains a significant challenge to fabricate photonics, NVs, and microfluidics in diamond. In this Progress Report, an overview is provided of ion irradiation and femtosecond laser writing, two promising fabrication methods for diamond‐based quantum technological devices. The unique capabilities of both techniques are described, and the most important fabrication results of color center, optical waveguide, and microfluidics in diamond are reported, with an emphasis on integrated devices aiming toward high performance quantum sensors and quantum information systems of tomorrow.

show abstract

Section: Deterministic Placement Of Color Centersmentioning

confidence: 99%

Quantum Micro–Nano Devices Fabricated in Diamond by Femtosecond Laser and Ion Irradiation

et al. 2019

View full text Add to dashboard Cite

show abstract

“…A beam of 2 MeV N + ions with diameter 0.3µm has been imaged on the sample. The N + beam is produced by the dynamitron tandem accelerator in Bochum (DTL) and focused using a highenergy ion projector equipped with a 15 T superconducting solenoid lens 11 . The regular pattern of implantation sites visible in Fig.…”

mentioning

confidence: 99%

Generation of single color centers by focused nitrogen implantation

Meijer

Burchard

Domhan

et al. 2005

Applied Physics Letters

246

213

View full text Add to dashboard Cite

Single defect centers in diamond have been generated via nitrogen implantation. The defects have been investigated by single defect center fluorescence microscopy. Optical and EPR spectra unambiguously show that the produced defect is the nitrogen-vacancy colour center.An analysis of the nitrogen flux together with a determination of the number of nitrogenvacancy centers yields that on average two 2 MeV nitrogen atoms need to be implanted per defect center. However, a much lower flux has been chosen such that at some implantation spots no NV center has been generated. We estimate that on average two nitrogen atoms are implanted per spot. To determine the number of NV centers per spot, the photon statistics of the spot emission is evaluated. For this, the normalized second-order autocorrelation function

show abstract

Single-Ion Implantation in Diamond with a High Lateral Resolution

Pezzagna

Meijer

2014

Comprehensive Hard Materials

View full text Add to dashboard Cite

Prospects of ion projection techniques for maskless implantation at high ion energies

Cited by 7 publications

References 18 publications

Quantum Micro–Nano Devices Fabricated in Diamond by Femtosecond Laser and Ion Irradiation

Quantum Micro–Nano Devices Fabricated in Diamond by Femtosecond Laser and Ion Irradiation

Generation of single color centers by focused nitrogen implantation

Single-Ion Implantation in Diamond with a High Lateral Resolution

Contact Info

Product

Resources

About