Proton-implantation technique for high-power laser light

Abstract

An arrayed configuration with proton-implanted current apertures creates the potential for more reliable, higher-powered vertical-cavity surface-emitting lasers.

910 nm vertical-cavity surface-emitting laser arrays with 100 W output power level and low driving current

“…The array exhibits a smooth optical pulse waveform signal. Different from previous reports, 20,24) no serious tailing phenomenon appears in our optical pulse waveform. Instead, a negative signal overshoot emerges, which soon returns to zero.…”

High-peak-power vertical-cavity surface-emitting laser quasi-array realized using optimized large-aperture single emitters

“…[1][2][3][4] Recently, high-power VCSELs under pulsed operation have attracted much attention owing to their potential applications such as laser fuzing, medical treatment, car-sensing, and laser ranging. [5][6][7][8][9][10] High-power VCSELs show excellent yield and reliability under short-pulse operation, benefiting from the suppressed self-heating effect within the active region and the absence of COD. Thus, the maximum output powers of 92 W 6) from a single emitter and 123 W 7) from a 16-arrayed emitter have been achieved under short-pulse operation.…”

“…Moreover, a high-power-density proton-implanted VCSEL array consisting of seven arrayed emitters with a 40 W peak power was reported. 8,9) Owing to the uniform current distribution at a small current aperture, a VCSEL array can achieve a higher external efficiency, 11) which is the main reason for its higher output power than large-aperture single emitters. However, because of the electrically parallel relationship between all of the element devices, the operating current of a VCSEL array must be very high to achieve a high output power.…”