The proton-induced single-event effect sensitivity of multiple feature size NAND flash memories has been studied. The single-event upset cross section of memories was obtained as a function of feature size, and the cross section of device increases significantly with increasing integration. Monitoring of the proton-irradiated devices for up to 2 months indicates that the retention errors of devices due to reduced insulating properties of the tunnel oxide layer are more critical than error annealing due to the annealing of the trapped charge. During the dynamic test, a large number of semipermanent and regular data “stuck bit” errors were captured, which disappeared after a few days of annealing. Micro-dose effect, which occurred in the external control circuit of NAND flash by proton-produced secondary particles, is considered responsible to the “stuck bit” errors.