Prototype microrobots for micro positioning in a manufacturing process and micro unmanned vehicles

Bright, Victor M.; Harsh, Kevin; Lee, Y.C.

doi:10.1109/memsys.1999.746891

Cited by 29 publications

(18 citation statements)

References 14 publications

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“…A microrobot prototype and a solar pow- (Kladitis et al 1999;Hollar et al 2003). It seems that they use dissymmetrical friction to move in a single direction, but the contrary friction produces a big resistance.…”

Section: Compare With Some Legged Robots and Microrobotsmentioning

confidence: 99%

Development of an underwater biomimetic microrobot with compact structure and flexible locomotion

2006

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Compact structure and flexibility is normally considered as a pair of incompatible characteristics for legged microrobots. Most robots choose complex structure of multi-joint legs to attain the flexibility, while some microrobots have poor flexibility for miniaturization. To attain a microrobot with both compact structure and flexible locomotion, we designed a novel type of biomimetic locomotion employing ionic conducting polymer film (ICPF) actuators as one-DOF legs. We developed several prototype microrobots using this locomotion. In this paper, a microrobot using this biomimetic locomotion, named Walker-3, utilizing six ICPF actuators with two-DOF motion is developed. It is 30 mm in length, 55 mm in width and 8 mm in height (in static state). Experimental results indicate that Walker-3 can attain 6 mm/s of walking speed and 7.1 deg/s of rotating speed and climb on a 30°ascent at a speed of 0.5 mm/s with control signal of 10 V, 0.5 Hz. It is also suitable for uncertain terrain, such as climbing on a stairs less than 2 mm high and striding over a pit less than 5 mm wide. It has better flexibility, balance and load ability than its predecessors. We compared it with some legged microrobots and the result shows a microrobot with this biomimetic locomotion can have both compact structure and multi DOF locomotion.

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Section: Compare With Some Legged Robots and Microrobotsmentioning

confidence: 99%

Development of an underwater biomimetic microrobot with compact structure and flexible locomotion

2006

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“…There are a myriad of potential uses, from surveillance to manufacturing to infrastructure monitoring to healthcare. One of the proposed approaches for their development is integration with Complementary Metal Oxide Semiconductor (CMOS) circuits for sensing and control, and thus much of the early work in this area has focused on the fabrication of Micro Electro Mechanical Systems (MEMS) on silicon substrates that provide actuation and might serve as "legs" [1], [2], [3], [4]. Another body of work has focused on the design of driving circuits which perform the necessary computation and provide signals for controlling such systems [5], [6], [7], [8].…”

Section: Introductionmentioning

confidence: 99%

Towards a legged chip

Datta

Abshire

Turner

2011

2011 IEEE International Symposium of Circuits and Systems (ISCAS)

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We describe a substrate for a Legged Chip, a CMOS integrated circuit with built in actuation mechanisms for motion. We have designed and fabricated a custom integrated circuit using a commercial 0.5μm CMOS technology which implements walking gait control. The circuit specifications and physical implementation have been designed to take into consideration the addition of thermal actuators through lowtemperature MEMS surface processing on fabricated CMOS dies. External connections will be limited to two leads for providing power and ground. This work represents progress towards a fully autonomous mobile integrated circuit.

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“…Multi-legged, cilia-like locomotion using Micro-ElectroMechanical-Systems (MEMS) have been demonstrated. Examples include a 15x5x1.5mm³ microrobot with polymide joints that could reach a velocity of 6mm/s [3], a 10x10x0.5 mm³, 90+ legged crawler though it exhibited payload carrying limitations [4], and a 30x10x1 mm³, 256-legged walking robot using out of plane thermal actuators, and demonstrated velocities of 1mm/s [5]. A similar out-of plane walking gait with 8 cilia was proposed in [6] using Ionic Polymer Metal Composite legs.…”

Section: Introductionmentioning

confidence: 99%

“…This microrobot has been designed to carry higher payloads and perform faster locomotion than its counterparts in [3][4][5][6][7][8]. Currently, the measured crawling speeds were up to 1.55 mm/s for a body mass of 3.8g, and the robot has a nominal load carrying capacity of 9g, more than twice its own weight.…”

Section: Introductionmentioning

confidence: 99%

ARRIpede: A stick-slip micro crawler/conveyor robot constructed via 2 ½D MEMS assembly

Murthy

Das

Popa

2008

2008 IEEE/RSJ International Conference on Intelligent Robots and Systems

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Recent advances in 2½D and 3D hybrid microassembly using MEMS snap fasteners and die-level bonding for interconnects, makes possible the miniaturization of exciting new small robots configured for various functions, such as flying, crawling, or jumping. ARRIpede is one example of a "die-size" crawling microrobot constructed by assembly and die stacking. It consists of a MEMS die "body", in-plane electrothermal actuators, vertically assembled legs, and an electronic "backpack" to generate the necessary gait sequence. The robot has been designed using a stick-slip simulation model for a target volume of 1.5cm x 1.5cm x 0.5 cm, a 3.8g mass, and velocities up to 3 mm/s. Even though work remains to be completed in packaging the robot, we demonstrated that the robot design is sound by experimentally evaluating the leg actuation force, the payload carrying capacity, the power consumption, and the manipulation ability of an inverted ARRIpede prototype. A configuration that carries a payload approximately equal to its own weight shows excellent steering ability. A reasonable match between simulations and experiments is noted, for example, when the legs are actuated at 45 Hz and 10V, the crawling velocity of the microrobot was experimentally measured to be 0.84mm/s or 18.7 μm per step, while the simulated leg displacement was 18.5 μm per step. The prototyped "conveyor" mode had a maximum measured linear velocity in excess of 1.5mm/s, while consuming approximately 500 mW of power. We expect that for achieving lower speeds, such as 0.15 mm/s, the power consumption can be reduced to a few mW, enabling untethered operation.

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Prototype microrobots for micro positioning in a manufacturing process and micro unmanned vehicles

Cited by 29 publications

References 14 publications

Development of an underwater biomimetic microrobot with compact structure and flexible locomotion

Development of an underwater biomimetic microrobot with compact structure and flexible locomotion

Towards a legged chip

ARRIpede: A stick-slip micro crawler/conveyor robot constructed via 2 ½D MEMS assembly

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Prototype microrobots for micro positioning in a manufacturing process and micro unmanned vehicles

Cited by 29 publications

References 14 publications

Development of an underwater biomimetic microrobot with compact structure and flexible locomotion

Development of an underwater biomimetic microrobot with compact structure and flexible locomotion

Towards a legged chip

ARRIpede: A stick-slip micro crawler/conveyor robot constructed via 2 &#x00BD;D MEMS assembly

Contact Info

Product

Resources

About

ARRIpede: A stick-slip micro crawler/conveyor robot constructed via 2 ½D MEMS assembly