The effect of high-pressure annealing on the performance and negative bias temperature illumination stress (NBTIS)-induced instability of amorphous InGaZnO (a-IGZO) thin-film transistors (TFTs) is investigated. IGZO TFTs that were annealed in a H 2 O vapor-assisted high-pressure O 2 atmosphere exhibited significantly improved field-effect mobility and stability against NBTIS compared with those annealed in only high-pressure O 2 or air. Annealing under high-pressure O 2 in the presence of H 2 O vapor effectively reduces oxygen-related defects, which act as subgap states within the bandgap. This phenomenon affects band alignments, including the bandgap and conduction band offset [ (E C -E F )] of IGZO semiconductors, and is the basis for the improved performance and stability of the TFTs.Amorphous oxide semiconductor (AOS)-based thin-film transistors (TFTs) are promising structures that can be incorporated in a variety of electronic applications, including large-area display panels such as active matrix liquid crystal displays (AMLCDs) and organic light-emitting diodes (AMOLEDs). 1,2 Their major advantages include high field-effect mobility, excellent uniformity, low processing temperature, and transparency in visible light. 3 Considerable research has been carried out to simultaneously improve the performance and stability of AOS-based TFTs. Although their electrical performance is acceptable, their poor stability under bias thermal illumination stress still remains a crucial problem that inhibits commercialization. 1,2 Many studies have been carried out on AOS-based TFTs to better understand the deterioration of the device stability under negative bias temperature illumination stress (NBTIS). 4-10 Although the origin of the degradation remains unclear, it is generally believed that the presence of donor-like oxygen vacancies (V O ) located within the wide AOS bandgap leads to poor device stability by shifting the threshold voltage. 11,12 Two mechanisms have been proposed concerning the relationship between V O and NBTIS instability, i.e., the trapping of photo-generated hole carriers 5,6 and the creation of ionized oxygen vacancy defects. 7-9 Several groups have annealed AOS-based TFTs to suppress such oxygen-related defects. Those approaches have included atmospheric-pressure annealing in H 2 O or O 2 , or H 2 O + O 2 , and high-pressure annealing (HPA) in O 2 . 7,10,13-15 Nomura et al. 10 reported that annealing in wet O 2 effectively decreased electron trapping, but there was no direct evidence for enhancement of NBTIS stability. Ji et al. 15 suggested that O 2 HPA of IGZO TFTs could strongly suppress the generation of photo-generated hole carriers. However, there is still a lack of direct electronic structure data to explain the variation in TFT performance, such as TFT mobility and NBTIS instability. There have been few reported attempts to improve simultaneously the performance and NBTIS stability of AOS-TFTs that can be implemented in backplane devices. In this work, the effect of ambient HPA on the perfo...