Pulse reverse plating for integrated magnetics on Si

Roy, Saibal; Connell, Arthur; Ludwig, Matthias; Wang, N.; O’Donnell, Terence; Brunet, Magali; McCloskey, Paul; O’Mathuna, Cian; Barman, Anjan; Hicken, R. J.

doi:10.1016/j.jmmm.2004.11.566

Cited by 38 publications

(17 citation statements)

References 11 publications

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“…11 The films were electrodeposited at a constant current density of 3 mA/ cm 2 . Pt/Ti pieces were used as anode and silicon wafer pieces ͑ϳ2 cm 2 area͒ with a sputtered Ti͑20 nm͒/Cu͑50 nm͒ seed layer were used as the cathode ͑subsequently referred to as Si/Ti/Cu substrates͒.…”

Section: Methodsmentioning

confidence: 99%

Precessional dynamics of Ni45Fe55 thin films for ultrahigh frequency integrated magnetics

Godsell

Kulkarni

O’Donnell

et al. 2010

Journal of Applied Physics

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Access to the full text of the published version may require a subscription. Future monolithic point of load switched mode power supplies will be expected to meet the energy requirements of miniaturized, high functionality electronic devices. Recently, Ni 45 Fe 55 has emerged as a potentially important material choice for use as a soft magnetic core material within high frequency integrated passive magnetic components. The operating frequency range of the integrated passives which form a key part of the point of load power supply must increase to allow for inductor/transformer miniaturization to become monolithic with power integrated circuits. In this work, an analysis of the high frequency permeability spectra of an electroplated Ni 45 Fe 55 thin film has been carried out to quantitatively analyze the material's high frequency performance. Complex permeability spectra of the film have been investigated at frequencies up to 9 GHz to identify both the film's spectroscopic splitting factor ͑g͒ and its effective dimensionless damping parameter ͑␣͒. The Kittel equation is utilized to identify g as 2.128, while ␣ is determined to be approximately 0.045. The critically damped condition for the film is also examined to extract ␣ in the critically damped case under a range of externally applied bias fields. It is concluded that for monolithic power inductors, improved device performance can be achieved when the ferromagnetic core is in an underdamped state up to a critical frequency. Rights

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Section: Methodsmentioning

confidence: 99%

Precessional dynamics of Ni45Fe55 thin films for ultrahigh frequency integrated magnetics

Godsell

Kulkarni

O’Donnell

et al. 2010

Journal of Applied Physics

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“…20 Electrodes were cut out from commercial brass and coated with a polymer, which left a plating area of 5 ϫ 5 mm 2 . The microstructure, composition, thickness, magnetic properties, and crystalline structure were determined using scanning electron microscopy, energy-dispersive x-ray spectroscopy ͑EDX͒, a surface profilometer, a 5 T superconducting quantum interference device magnetometer, and x-ray diffraction with Cu K␣ radiation, respectively.…”

Section: Methodsmentioning

confidence: 99%

Dependence of magnetic properties on micro- to nanostructure of CoNiFe films

Rhen

Roy

2008

Journal of Applied Physics

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The magnetic properties of electrodeposited CoNiFe films with thicknesses varying from 0.20 to 10 μm were studied. The films show a single face-centered-cubic CoNiFe phase with grain sizes ranging from 23 to 29 nm. The coercivity is controlled by a combination of the morphology and nanocrystalline structure of the deposits. The nanocrystalline grain size determines the intrinsic coercivity associated with crystalline anisotropy as in the random anisotropy model, whereas an additional morphology term of coercivity is controlled by the thickness inhomogeneity on a submicron scale. The thin films show considerable roughness and a higher coercivity, up to a level of 560 A m−1 (7.0 Oe) in 250 nm films. The thick films show coercivity values of as low as 16 A m−1 (0.2 Oe). The coercivity dependence on thickness was fitted using a simple model combining a morphology dependent additional contribution term to the random anisotropy model as Hc=Hcmorph+Hcanis. Good agreement between the model and the experimental results was obtained.

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“…1(d)] was prepared by an electrodeposition process 15 on patterned substrates fabricated by nanoimprint lithography. 5 A polymethylmethacrylate (PMMA, molecular weight ∼230 k) layer of 1 μm thick was spin-coated on a cleaned, 0.5-mm-thick silicon substrate and baked at 100 • C for 10 min in air.…”

Section: Methodsmentioning

confidence: 99%