Pulsed electro-acoustic (PEA) measurements of embedded charge distributions

Abstract

Knowledge of the spatial distribution and evolution of embedded charge in thin dielectric materials has important applications in semiconductor, high-power electronic device, high-voltage DC power cable insulation, high-energy and plasma physics apparatus, and spacecraft industries. Knowing how, where, and how much charge accumulates and how it redistributes and dissipates can predict destructive charging effects. Pulsed Electro-acoustic (PEA) measurementsand two closely related methods, Pressure Wave Propagation (PWP) and Laser Intensity Modulation (LIMM)nondestructively probe such internal charge distributions. We review the instrumentation, methods, theory and signal processing of simple PEA experiments, as well as the related PPW and LIMM methods. We emphasize system improvements required to achieve high spatial resolution for in vacuo measurements of thin dielectrics charged using electron beam injection.

Effects of Sample Adhesives Acoustic Properties on Spatial Resolution of Pulsed Electroacoustic Measurements

“…Measurements were made with a custom ambient PEA test apparatus [1]. Pulse amplitudes of 2000 V and width of 5 ns were used.…”

“…Pulsed Electroacoustic (PEA) measurements are arguably the most promising of several methods for making measurements of spatial distributions and time evolution of embedded charge [1,2]. Such measurements have many important applications.…”

“…These include studies of enhanced spacecraft materials and the increased survivability of spacecraft systems in extreme space environments. They also have widespread applications, including microelectronics, high-power electronic devices, high-voltage DC power cable insulation, high-energy accelerators, plasma physics facilities and deposition systems, and microwave generators [1]. Advantages of PEA method include nondestructive measurements, low cost, simplified modeling, and high spatial resolution typically on the order of 10 μm [2][3][4].…”

“…The PEA method, outlined in Fig. 1, is as follows [1]. An electric field is applied to a charged layer within a dielectric with a pulsed high voltage signal.…”

PEA System Modeling and Signal Processing for Measurement of Volume Charge Distributions in Thin Dielectric Films

“…Pulsed Electro-Acoustic (PEA) measurement techniques are nondestructive and, arguably, one of the most promising methods to provide the desired information on internal charge distributions related to spacecraft charging issues [1,2].…”