Pulsed laser deposition of piezoelectric ZnO thin films for bulk acoustic wave devices

Textured dense zinc oxide layers for active noise canceling windows

“…The orientation distribution is broader than those from other processing routes reported in literature. With pulsed laser deposition the HWHM are smaller than 3° . For laser ablation smaller than 1° and for solvothermal routes even in range of some tenth arcsec .…”

“…On the other hand, little research is devoted to the generation of dense and thick (>10 μm) ZnO films. There are reports from sputtered dense ZnO films and other methods such as sol‐gel, PLD, chemical vapor deposition (CVD), but generally these methods have disadvantages intrinsic to the particular coating process, for example, limitations in substrate size, crystal orientation, use of hazardous and harmful precursors, maximum achievable film thickness or they simply require too costly equipment. With the sol‐gel approach a time‐consuming repetition of the dip‐coating process is necessary to build up layers of a thickness of 1 μm.…”

Introductory Chapter: Overview of ZnO Based Nano Materials and Devices

“…There are several applications were reported based on ZnO based nanomaterials. These applications include the transparent electronic devices [29], the UV light emitters [30], the piezoelectric devices [31], the p-n junction devices [32], the field effect devices [33], the sensors [34], the optoelectronics [35], and the field emission devices [36].…”

Impedance spectroscopy and sensors under ethanol vapors application of sprayed vanadium-doped ZnO compounds

“…Zinc oxide ZnO is a typical n-type semiconductor, with a wide band-gap of ~3.3 eV at 460°C [1], has been proved to be a various applications such as in UV region, especially as TCO in solar cells, gas sensors and acoustic devices (LEDs) [2][3][4]. ZnO thin films can be fabricated using laser ablation [5], RF magnetron sputtering [6], phase Spray paralysis [1] and sol-gel process [7] etc... Measurements of AC conductivity of oxide thin films, such as: ZnO:Cu, ZnO:Ni, WO 3 and Sb 2 O 4 have been extensively studied, where the basic characteristic of the real part of AC conductivity is a power law frequency dependence [8][9][10][11].…”