Comprehensive Materials Processing 2014
DOI: 10.1016/b978-0-08-096532-1.00705-6
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PVD Technology in Fabrication of Micro- and Nanostructured Coatings

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Cited by 26 publications
(14 citation statements)
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“…Physical layer deposition (PVD) is one of the bottom-up techniques that includes ion implantation like molecular beam epitaxy (MBE) [62]. The method can be applied only to thin layers of MoS 2 and the resulting grain sizes are variable [63]. Chemical vapor deposition (CVD) is applied to thin and thick layers, where Mo is laid over a substrate and Sulfur vapor passes over it.…”
Section: Synthesismentioning
confidence: 99%
“…Physical layer deposition (PVD) is one of the bottom-up techniques that includes ion implantation like molecular beam epitaxy (MBE) [62]. The method can be applied only to thin layers of MoS 2 and the resulting grain sizes are variable [63]. Chemical vapor deposition (CVD) is applied to thin and thick layers, where Mo is laid over a substrate and Sulfur vapor passes over it.…”
Section: Synthesismentioning
confidence: 99%
“…The resulting vapor phase in both of evaporation and sputtering has thereafter been deposited onto desirable substrate during condensation mechanism. The development of PVD, such as create highly ionized vapor and high-power laser ablates to from the target of a vapor through cathodic arc and pulsed laser deposition [13][14][15][16] . The growing various inorganic nanostructures such as ZnO nanobars 17 , BN nanotubes 18 , Ga2O3 nanoribbons 19 and aligned TiO2 nanocolumnar layers 20 with PVD expertise have, therefore, been achieved in recent reports (Fig.1).…”
Section: Physical Vapor Depositionmentioning
confidence: 99%
“…Generally, the following steps, such as the solution formation, gelation, drying, and densification are dividedly explained the way of this route. The condensation polymerization and hydrolysis processes are hard to detach 11,15,42 . During for recent reports, it clear that most research concern for metal oxide composites such as TiO2, UO2, TnO2, ZrO2 ,CeO2, SnO2, SiO2,CuO, SnO2, ZnO, Al2O3, Sc2O3, ZnTiO3, SrTiO3, BaZrO3 and CaSnO3 nanostructures, have, therefore, been prepared .…”
Section: Sol-gel Processmentioning
confidence: 99%
“…Physical vapor deposition PVD coating is a product that is currently being used to enhance a number of products, including automotive parts such as wheels and pistons, surgical tools, drill bits, and guns [35,36].…”
Section: Physical Vapor Deposition (Pvd)mentioning
confidence: 99%