Pyroelectric properties of thin ferroelectric films and their applications for integrated circuits

Pevtsov, E Ph; Maleto, Michael I.; Petrovsky, Vladimir; Сигов, А. С.; Chernokozhin, Vladimir V.

doi:10.1016/0167-9317(95)00123-9

Cited by 6 publications

(1 citation statement)

References 5 publications

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“…As an example, let us take a look at the specific device that performs an analog multiplication of two signals. Concrete realization scheme of this procedure is discussed in [10]. The charges come to the CCD registers from an external device, according to a predetermined fashion, which yields a given voltage distribution applied to each pyroelectric detector, and consequently, causes its partial depolarization with corresponding change of sensitivity of each element of the detector array.…”

Section: Pyroelectric-ccd Structure Modelingmentioning

confidence: 99%

<title>Uncooled array IR sensors integrated with CCD analog processor</title>

2002

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Abstracts. The technological methods proposed above allow one to prepare integrated structures of multielement heat detectors and special CCD. In thin structure the sensitive film is isolated from the substrate by means of a supporting membrane or serves as the membrane itself. Such a technology seems to be advantageous in further development of different MEMS structures. There is created a completely monolithic pyroelectric array of sensors 100×100 µm 2 based on a heat-sensitive film construction lifted slightly above the crystal and also detector specimens with NETD less than 0.2-0.5 K (8-12 µm at 300 K and 20-50 Hz of modulation frequency). Derived measurements and investigations allowed us to choose the structure of 2D analog CCD processor which now is under design and which will be integrated with pyroelectric membrane array.

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Section: Pyroelectric-ccd Structure Modelingmentioning

confidence: 99%