Quality improvement and mode evolution of high-Q lithium niobate micro-disk induced by “light annealing”

Ge, Licheng; Jiang, Haowei; Liu, Yian; Zhu, Bing; Lu, Chenghao; Chen, Yuping; Chen, Xianfeng

doi:10.1364/ome.9.001632

Cited by 17 publications

(4 citation statements)

References 30 publications

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“…In past years, various kinds of microresonators have been demonstrated both in bulk LN and TFLN platforms. 43,181,192,193,197,[214][215][216][217][218]221,222,224,[227][228][229][230][231][232][233][234][235][236][237][238][239][240] In bulk periodically poled Z-cut LN crystals, a high Q factor of 2 × 10 7 was measured by mechanically polishing the LN crystal, 227 as shown in Fig. 7(a).…”

Section: Passive Devicesmentioning

confidence: 99%

Advances in lithium niobate photonics: development status and perspectives

Chen

et al. 2022

Adv. Photon.

139

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Section: Passive Devicesmentioning

confidence: 99%

Advances in lithium niobate photonics: development status and perspectives

Chen

et al. 2022

Adv. Photon.

139

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“…Besides high temperature reheating, femtosecond laser modification was also used as another novel “light annealing” method. [ 78 ] After fabrication, the femtosecond laser was focused on the middle between the periphery and the center of the microdisk. By means of the laser spot, a tiny defect on the top side appeared, thanks to which the following laser pulses were scattered into the cavity modes to further smooth the sidewall of the microdisk.…”

Section: Fabrication and Investigation Techniquesmentioning

confidence: 99%

Microresonators in Lithium Niobate Thin Films

Xie

Chen

et al. 2021

Advanced Optical Materials

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geometries of microcavities supporting "whispering gallery modes" (WGMs) the light field can be confined in extremely small volumes, reaching very high power density and very narrow spectral linewidth. As a result, the ultrahigh in-cavity intensities significantly enhance the photon-tophoton interactions, leading to ultrahigh efficiencies of nonlinear optical process even at low-power optical excitation. In addition, the small scale enables the construction of resonator-based functional devices with very high integration. With combination of these intriguing features, low-power-consumption, low-cost on-chip devices can be developed successfully. The material platforms for microresonators are crucial for the practical applications. For example, silicon dioxide (SiO 2 ) is considered as one of the most commonly used materials for microresonators, and great success has been achieved based on this easy-to-fabricate platform. [29,30] Recently, with the well-developed technology for on-chip circuits fabrication, some semiconductor materials have been harnessed as the platforms of microresonators for more electro-optic potentials, such as silicon (Si), [31,32] SiC, [33][34][35][36] ZnO, [37,38] GaN, [39,40] or AlN [41,42] . Among them, lithium niobate (LiNbO 3 or LN) has risen into the forefront of microresonator demonstrations and drawn extensive interests in photonics and electronics.Lithium niobate is a multi-functional dielectric crystal that combines a number of excellent features, [43] such as electrooptic, nonlinear optical, acousto-optic, ferroelectric, piezoelectric, photorefractive, photo-luminescent properties, and receives a broad variety of applications in telecommunication, frequency conversion, optical storage, filtering, and quantum photonics. [44][45][46][47] The single-crystal thin film of LN is an ideal platform for microresonators owing to the unique combination of various excellent properties of the bulk. The major obstacle of the LN-based microcavities was the fabrication of high-quality LN thin films because the single-crystalline features cannot be well-preserved in thin-film LN produced by chemical methods of normal deposition that is applied for semiconductors. In addition, large-scale LN-thin film wafers are desired for further processing of on-chip devices. Recently, the so-called "lithium niobate on insulator" (LNOI) technology figures the major problem out and boosts the rapid development of the thin-film LN based devices. [48][49][50][51][52][53] Most used LN films are manufactured by smart " Ion cut" technique. The typical commercialized LN thin film based on ion cut consists of a single-crystalline LN thin film with thickness of 300-900 nm, a cladding layer of SiO 2 with thickness of 2-3 µm, and the supporting material (LN or Si bulk wafer). The fabrication process of ion-cut LN thin film can be referenced in details elsewhere. [54][55][56] The refractive Leveraging the outstanding nonlinear optical properties and the ultra-high spatial confinement of light, microresonators based on lith...

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“…Compared with the traditional etching methods, fs laser writing allows fast single-step maskless fabrication of 3D waveguides in transparent materials. In particular, complex novel optical structures inside the material bulk can be produced through modulation of the refractive index by fs laser pulses [25][26][27]. In fs laser writing, the highintensity laser is focused on the desired location inside the transparent material, strong-field or avalanche ionization results in micro alteration of the local lattice structure and modification (Δn) of the refractive index [20].…”

Section: Introductionmentioning

confidence: 99%

Three-dimensional polarization-dependent full-wavelength beam splitter written by femtosecond laser in LiNbO3 crystal

Lv,

Li,

et al. 2024

Preprint

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We report on the fabrication of Y-branched waveguide beam splitters with cladding structures in LiNbO3 crystal by direct femtosecond laser writing. The femtosecond laser writes tracks near the surface of the crystal, constructing a square structure based on the Type II geometry. The waveguides beam splitters support propagation of full-wavelength light from the visible to mid-infrared, which was experimentally and numerically investigated. In addition, it has been found that the guidance is only along the vertical (i.e., TM) polarization, which is due to the different refractive indices in the longitudinal and transverse directions. The femtosecond-laser writing here also represents an alternative for fabricating complex integrated light guiding in crystals.

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Quality improvement and mode evolution of high-Q lithium niobate micro-disk induced by “light annealing”

Cited by 17 publications

References 30 publications

Advances in lithium niobate photonics: development status and perspectives

Advances in lithium niobate photonics: development status and perspectives

Microresonators in Lithium Niobate Thin Films

Three-dimensional polarization-dependent full-wavelength beam splitter written by femtosecond laser in LiNbO3 crystal

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