2021
DOI: 10.1016/j.ultramic.2021.113399
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Quantitative amplitude-modulation scanning Kelvin probe microscopy via the second eigenmode excitation

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Cited by 3 publications
(6 citation statements)
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“…(5) We consider the capacitive terms to be equivalent for different eigenmodes, allowing for a direct division of the electrostatic force harmonics in order to access CPD. Some authors have indicated that the capacitance contribution of the lever differs at higher eigenmodes due to the mode shape of the cantilever [17,60,63]. This would primarily affect the accuracy of CPD for purely electrical modes dependent on C′ as the mechanically coupled modes dependent on C″ have minimal cantilever contribution [101].…”
Section: Discussionmentioning
confidence: 99%
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“…(5) We consider the capacitive terms to be equivalent for different eigenmodes, allowing for a direct division of the electrostatic force harmonics in order to access CPD. Some authors have indicated that the capacitance contribution of the lever differs at higher eigenmodes due to the mode shape of the cantilever [17,60,63]. This would primarily affect the accuracy of CPD for purely electrical modes dependent on C′ as the mechanically coupled modes dependent on C″ have minimal cantilever contribution [101].…”
Section: Discussionmentioning
confidence: 99%
“…This limits the accessible bandwidth and, therefore, the scanning speed [10]. (3) Higher eigenmodes -by applying the electrical signal to a higher eigenmode, the electrostatic response can be measured simultaneously with topography in a single pass [17,[60][61][62]. Higher eigenmodes typically have poorer SNRs than the fundamental eigenmode since k n increases more rapidly than Q n [60,61].…”
Section: Introductionmentioning
confidence: 99%
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