Quantitative Auger electron analysis of homogeneous binary alloys of Cr, Fe and Ni

Liday, Jozef; Hofmann, S.; Harman, R.

doi:10.1016/0042-207x(92)90166-t

Cited by 8 publications

(1 citation statement)

References 29 publications

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“…Hence, the quantities needed to evaluate elemental concentrations (Auger current and elemental sensitivity factors) cannot be determined from the amplitude of the Auger peaks but from the area below the peaks in N (E) spectra [1,2]. Other phenomena affecting the accuracy of quantitative analysis are the changes in morphology, structure and initial composition in the surface region caused by bombarding the surface by high energy ions used for depth profiling.…”

Section: Introductionmentioning

confidence: 99%

Some Aspects of Quantitative Analysis of Ternary Alloys of Group III-Nitrides by Auger Electron Spectroscopy

Liday¹,

Vogrinčič²,

Ecke³

2011

Journal of Electrical Engineering

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In this work, the quantities have been determined experimentally that are needed for reliable and precise quantitative interpretation of Auger spectra of nitrides AlN, GaN and of their ternary alloys AlxGa 1−x N . Measurements of reference samples AlN and GaN under various parameters of the primary electron beam (energy 3 and 5 keV, beam incidence angle with respect to the surface normal 12.5 • and 45 • ) and of the ion beam (energy 0.5 and 1.0 keV, beam incidence angle with respect to the surface normal 67.5 • and 35 • ) allowed to find the elemental sensitivity factors for these nitrides, and measurements on reference samples of ternary alloys AlxGa 1−x N allowed to find the component sputtering yields Y Ga /Y Al . To the best of our knowledge there is a lack of such data for those materials in the literature.

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Section: Introductionmentioning

confidence: 99%

Some Aspects of Quantitative Analysis of Ternary Alloys of Group III-Nitrides by Auger Electron Spectroscopy

Liday¹,

Vogrinčič²,

Ecke³

2011

Journal of Electrical Engineering

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Use of the Peak-to-background Ratio for Quantitative Auger Analysis of Semi-insulating Polycrystalline Silicon Layers

Liday

Tomek

Vogrinčič

et al. 1996

Surf. Interface Anal.

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The work presents the results of quantitative evaluation of Auger electron spectra utilizing the heights of Auger peaks normalized with respect to the background inN(E)vs.E distribution curves. The quantification method used was verified on a series of semi‐insulating polycrystalline silicon samples with a variable content of oxygen. The results obtained were compared with those yielded by other procedures of quantitative AES, and by secondary neutral mass spectrometry.

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Practice of Surface and Interface Analysis with AES and XPS

Hofmann

2012

Springer Series in Surface Sciences

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Quantitative Auger electron analysis of homogeneous binary alloys of Cr, Fe and Ni

Cited by 8 publications

References 29 publications

Some Aspects of Quantitative Analysis of Ternary Alloys of Group III-Nitrides by Auger Electron Spectroscopy

Some Aspects of Quantitative Analysis of Ternary Alloys of Group III-Nitrides by Auger Electron Spectroscopy

Use of the Peak-to-background Ratio for Quantitative Auger Analysis of Semi-insulating Polycrystalline Silicon Layers

Practice of Surface and Interface Analysis with AES and XPS

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