2016
DOI: 10.1117/12.2237646
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Quantitative characterization of aberrations in x-ray optics

Abstract: Due to the weak interaction of X-rays with matter and their small wavelength on the atomic scale, stringent requirements are put on X-ray optics manufacturing and metrology. As a result, these optics often suffer from aberrations. Until now, X-ray optics were mainly characterized by their focal spot size and efficiency. However, both measures provide only insufficient information about optics quality. Here, we present a quantitative analysis of residual aberrations in current beryllium compound refractive lens… Show more

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Cited by 8 publications
(3 citation statements)
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“…We propagated Ψ back to the lens exit to obtain Ψ exit ( x , y ). To reveal phase errors, we subtracted the phase of a spherical wave with radius Δ z = z f − z exit that was matched to the distance from lens exit z exit to focal plane z f of the Be CRL 34 :…”
Section: Methodsmentioning
confidence: 99%
“…We propagated Ψ back to the lens exit to obtain Ψ exit ( x , y ). To reveal phase errors, we subtracted the phase of a spherical wave with radius Δ z = z f − z exit that was matched to the distance from lens exit z exit to focal plane z f of the Be CRL 34 :…”
Section: Methodsmentioning
confidence: 99%
“…One must next examine restrictions on the optics' shape errors. The Marchal criterion [98], is often used to assess the quality of an optical system. It states that an adequate optical system must possess SR ≥ 0.8, e.g.…”
Section: X-ray Opticsmentioning
confidence: 99%
“…4) the first 37 Zernike polynomials were fitted to the retrieved wavefields. 36 The resulting amplitudes z If the center of the diffraction pattern is not exactly in the center of a single pixel, a slight tilt is introduced into the reconstructed wavefield to compensate for the off-centered optical axis. When introducing the phase plate into the optical system the tilt error changed, getting more pronounced for DLS and LCLS, represented by Figs.…”
Section: Aberration-corrected Beryllium Lensesmentioning
confidence: 99%