Quantitative elastic recoil detection

Bergmaier, A.; Dollinger, G.; Frey, C.M.

doi:10.1016/0168-583x(94)00666-0

Cited by 58 publications

(14 citation statements)

References 6 publications

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“…Direct calculation codes without simulation, for example LORI [5], SQUEAKIE [6] or KONZERD [7], are not considered. Simulation of methods involving photons, such as PIXE [8] and PIGE, as well as channeling in single crystalline materials [9], are also not considered.…”

Section: Introductionmentioning

confidence: 99%

Computer simulation of ion beam analysis: Possibilities and limitations

Mayer

Eckstein

Langhuth

et al. 2011

Nuclear Instruments and Methods in Physics Research Section B:

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Quantitative application of ion beam analysis methods, such as Rutherford backscattering, elastic recoil detection analysis, and nuclear reaction analysis, requires the use of computer simulation codes. The different types of available codes are presented, and their advantages and weaknesses with respect to underlying physics and computing time requirements are discussed. Differences between different codes of the same type are smaller by about one order of magnitude than the uncertainty of basic input data, especially stopping power and cross section data. Even very complex sample structures with elemental concentration variations with depth or laterally varying structures can be simulated quantitatively. Laterally inhomogeneous samples generally result in an ambiguity with depth profiles. The optimization of ion beam analysis measurements is discussed, and available tools are presented.

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Section: Introductionmentioning

confidence: 99%

Computer simulation of ion beam analysis: Possibilities and limitations

Mayer

Eckstein

Langhuth

et al. 2011

Nuclear Instruments and Methods in Physics Research Section B:

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“…Similarly, the ERDA measurements used a 1.2 nA 200 MeV Au 15+ beam at inclinations of 7°and 19°and a scattering angle of 37.5°. All RBS data was analysed using the IBA Data Furnace software package [5], and the KONZERD program [6] was used for ERDA data processing.…”

Section: Methodsmentioning

confidence: 99%

Quantitative analysis of thin film compositions using EFTEM combined with RBS and ERDA

Lindner¹,

Häberlen²,

Schwarz³

et al. 2007

Microelectronic Engineering

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“…Off-line, each mass branch is projected separately onto the energy axis to obtain energy spectra. By fitting these spectra with the aid of a simulation computer program 4 or by the code KONZERD, 5 which directly converts the energy spectra into elemental concentration distributions, the composition and the thickness (respectively the concentration depth profiles) are reconstructed. With reasonable measuring times of 10-60 min a detection limit of the order of 10 ppm can be achieved.…”

Section: Methodsmentioning

confidence: 99%

Calibration of various analytical methods with heavy‐ion ERDA

Bohne¹,

Lindner²,

Röhrich³

et al. 2004

Surface & Interface Analysis

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Heavy-ion ERDA (elastic recoil detection analysis) can be used to characterize thin solid layers. Absolute concentrations of the chemical elements can be detected as well as the layers' thickness and depth profiles. For the measurement, the sample is irradiated with a heavy-ion beam. Atoms of the sample are recoiled and detected with an energy and mass dispersive spectrometer. Since the ERDA principle is based on the classical Rutherford scattering theory, the expected yields for the given conditions can be calculated exactly. Therefore, ERDA is a standard-free method. Absolute concentrations can be determined for all detected chemical elements simultaneously. By comparison with ERDA measurements an FT-IR (Fourier transform-infrared) spectrometer, routinely used to determine the stoichiometry of ZnO layers, was calibrated. Artefacts in SIMS (secondary ion mass spectrometry) data for the characterization of chalcopyrite based solar cell absorbers are ruled out.

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Quantitative elastic recoil detection

Cited by 58 publications

References 6 publications

Computer simulation of ion beam analysis: Possibilities and limitations

Computer simulation of ion beam analysis: Possibilities and limitations

Quantitative analysis of thin film compositions using EFTEM combined with RBS and ERDA

Calibration of various analytical methods with heavy‐ion ERDA

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