2014
DOI: 10.1103/physrevlett.112.085501
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Quantitative Elemental Mapping at Atomic Resolution Using X-Ray Spectroscopy

Abstract: Elemental mapping using energy-dispersive x-ray spectroscopy in scanning transmission electron microscopy, a well-established technique for precision elemental concentration analysis at submicron resolution, was first demonstrated at atomic resolution in 2010. However, to date atomic resolution elemental maps have only been interpreted qualitatively because the elastic and thermal scattering of the electron probe confounds quantitative analysis. Accounting for this scattering, we present absolute scale quantit… Show more

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Cited by 110 publications
(85 citation statements)
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“…As in all EDS maps of thicker specimens, beam broadening, de-channeling and X-ray reabsorption add a lot of non-local information to the elemental maps (Spurgeon et al). For these reasons, atomic column-wise quantitative composition measurements are difficult, although such feats have been achieved with careful modeling of the electron probe and its interaction with the specimen (Lu et al, 2013;Kothleitner et al, 2014).…”
Section: Resultsmentioning
confidence: 99%
“…As in all EDS maps of thicker specimens, beam broadening, de-channeling and X-ray reabsorption add a lot of non-local information to the elemental maps (Spurgeon et al). For these reasons, atomic column-wise quantitative composition measurements are difficult, although such feats have been achieved with careful modeling of the electron probe and its interaction with the specimen (Lu et al, 2013;Kothleitner et al, 2014).…”
Section: Resultsmentioning
confidence: 99%
“…However, the data can only be interpreted qualitatively because the elastic and thermal scattering of the electron probe confounds quantitative analysis. [34] High resolution elemental mapping can be collected with sample tilting to create a three dimensional re-construction. This method is particularly useful for particles with a domain structure, or coreshell structure, or any phase separation.…”
Section: Crystal Facets and Growth Orientationmentioning
confidence: 99%
“…Assuming the existence of high symmetry orientations having projected atom-atom distances longer than ~0.1 nm, every atomic column in a lattice may be imaged. Upon combination with a spectroscopy technique such as electron energy loss spectroscopy (EELS) [24] or energy-dispersive X-ray spectroscopy (EDS) [25], compositional mapping with atomic resolution becomes feasible for a suitably thin and stable specimen.…”
mentioning
confidence: 99%