2010
DOI: 10.1364/ol.35.000784
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Quantitative infrared imaging of silicon-on-insulator microring resonators

Abstract: There is considerable research activity in multiresonator optical circuits in silicon photonics, e.g., for higher-order filters, advanced modulation format coding/decoding, or coupled-resonator optical waveguide delay lines. In diagnostics of such structures, it is usually not possible to measure each individual microring resonator without adding separate input and output waveguides to each resonator. We demonstrate a non-invasive diagnostic method of quantitative IR imaging, applied here to a series cascade o… Show more

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Cited by 58 publications
(74 citation statements)
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“…Another approach to cope with disorder-related issues and restore the proper behavior of CROWs would be to perform a post-fabrication trimming procedure of the structure parameters after testing the device with specific monitoring techniques to retrieve the phase errors [155,156]. To this end, photosensitive materials such as polymers and chalcogenide glasses have been successfully employed [101,102].…”
Section: Effects Of Disorder In Crowsmentioning
confidence: 99%
“…Another approach to cope with disorder-related issues and restore the proper behavior of CROWs would be to perform a post-fabrication trimming procedure of the structure parameters after testing the device with specific monitoring techniques to retrieve the phase errors [155,156]. To this end, photosensitive materials such as polymers and chalcogenide glasses have been successfully employed [101,102].…”
Section: Effects Of Disorder In Crowsmentioning
confidence: 99%
“…Whereas other configurations might isolate the collected signal using a pinhole and photodiode, 37 our scheme relies on the position sensitive detection capability of the photodetector camera, similar to what has been reported for measurements on multiple ring resonator systems. 38 The vertical radiation spectra similarly reveals the single high Q-factor resonance at 1513.9 nm, but with an even higher signal-to-noise ratio, confirming that both the measured Q-factor and $0.12 transmission level are limited by the radiation losses. Lorentzian fitting of both resonance measurements reveals a measured quality factor, Q meas $ 7.42 Â 10 3 .…”
mentioning
confidence: 55%
“…We collect the output light from the waveguides in reflection and image them an uncooled infrared focal plane array (IR FPA, Goodrich). The waveguides roughness scatters the coupled light along the propagation and serves as an indication of proper coupling 42 .…”
Section: Methodsmentioning
confidence: 99%