Quantitative Investigation of Surface Charge Distribution and Point Probing Characteristics of Spherical Scattering Electrical Field Probe for Precision Measurement of Miniature Internal Structures with High Aspect Ratios

Abstract

For precision measurement of miniature internal structures with high aspect ratios, a spherical scattering electrical field probe (SSEP) is proposed based on charge signal detection. The characteristics and laws governing surface charge distribution on the probing ball of the SSEP are analyzed, with the spherical scattering electrical field modeled using a 3D seven-point finite difference method. The model is validated with finite element simulation by comparing with the analysis results of typical situations, in which probing balls of different diameters are used to probe a grounded plane with a probing gap of 0.3 μm. Results obtained with the proposed model and finite element method (FEM) simulation indicate that 31% of the total surface charge on a ϕ1 mm probing ball concentrates in an area that occupies 1% of the total probing ball surface. Moreover, this surface charge concentration remains unchanged when the surface being measured varies in geometry, or when the probing gap varies in sensing range. Based on this, the SSEP has realized approximate point probing capability with a virtual “needle” of electrical effect. Together with its non-contact sensing characteristics and 3D isotropy, it can, therefore, be concluded that the SSEP has great potential to be an ideal solution for precision measurement of miniature internal structures with high aspect ratios.

Special Issue on Manufacturing Metrology

“…For precision measurement of miniature internal structures with high aspect ratios, a spherical scattering electrical field probe (SSEP) was proposed based on charge signal detection. The developed SSEP has great potential to be the ideal solution for precision measurement of miniature internal structures with high aspect ratios [17]. For the evaluation of roundness of small cylinders, the linear-scan surface form stylus profilometer was employed.…”