Quantitative investigation on a period variation reduction method for the fabrication of large-area gratings using two-spherical-beam laser interference lithography

Rao, Ratish Rao Nagaraj; Bienert, Florian; Moeller, Michael; Bashir, Danish; HAMRI, Alina; celle, frederic; Gamet, Émilie; Ahmed, Marwan Abdou; Jourlin, Yves

doi:10.1364/oe.478688

Cited by 7 publications

(3 citation statements)

References 24 publications

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“…The first step was the fabrication of a master sample by interferential photolithography 28 with a period Λ = 630 nm and a depth d = 80 nm. The AFM profile of this sample is shown in Fig.…”

Section: Resultsmentioning

confidence: 99%

In situ monitoring of thin alumina passive film growth by surface plasmon resonance (SPR) during an electrochemical process

Dutems,

Crespo-Monteiro,

Faverjon

et al. 2024

Sci Rep

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This article presents a sensing technique to characterize the growth of an alumina passive film on an aluminum micro structured layer in situ. The technique uses surface plasmon resonance (SPR) on aluminum coated gratings with spectroscopic measurements during electrochemical polarization in 0.02M Na2SO4. The structure of the sensor was first simulated and then fabricated by photolithography. The grating was then replicated by nanoimprint (NIL) in Sol–Gel before pure aluminum layer was deposited by RF magnetron sputtering to produce the samples used in this study. Coupled plasmonic and electrochemical measurements confirmed the feasibility of in situ characterization (thickness) of alumina passive film on aluminum-based gratings in neutral aqueous media. Combining both measurements with an appropriated SPR spectrum fitting lead to alumina thickness monitoring within a few nanometers’ accuracy. The objectives and challenges of this study are to better characterize the alumina growth during electrochemical process combining in situ electrochemical process and SPR spectra in order to determine thin passive layer characteristics.

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Section: Resultsmentioning

confidence: 99%

In situ monitoring of thin alumina passive film growth by surface plasmon resonance (SPR) during an electrochemical process

Dutems,

Crespo-Monteiro,

Faverjon

et al. 2024

Sci Rep

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“…Unlike finesse in engraving, these methods are not efficient due to the type of serialization [27]. A more suitable fabrication method is laser-assisted lithography, which includes nanoimprint lithography [28] and laser interference lithography (LIL) [29]. By these methods, sub-100 nm structures have been fabricated.…”

Section: Design and Methodologymentioning

confidence: 99%

Design of a high-resolution magneto-plasmonic biosensor for analyte detection

Abbasi,

Salehi,

Emami

2024

J. Opt.

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This paper introduces the design of a magneto-plasmonic refractometric sensor aimed at achieving high resolution. This sensor consists of arrays of gold nanowires and layers of SiO2 and Co6Ag94, where the analyte is placed on the gold nanowires. A p-polarized optical field with a wavelength of 631 nm is used to excite the structure, which is applied in the range of 1º to 45º. A magnetic field is applied to z-axis to create the magneto-optical effect. The reflected optical field of the samples is used to calculate the signal of the transverse magneto-optical Kerr effect (TMOKE), which shows significant changes in the refractive index of the samples and the direction of the magnetic field. The highest displacement is 4º. The highest value of the figure of merit (FoM) is 3611 RIU-1, and the maximum sensitivity is obtained as 71 º/RIU.

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“…LIL also enables fabrication of nanograting on large areas. In addition, another study [153] experimentally showed that this effect can be significantly reduced (by 86%) for such gratings by adding a simple a concave vacuum chuck to the traditional setup used for LIL. Yet, we observed that a prolonged exposure to fluids of the gratings produced by LIL was damageable and modified the surface of these samples.…”

Section: Fabrication Of the Grating Couplersmentioning

confidence: 99%

Development of a new plasmonic transducer for the detection of biological species

Laffont

Crespo‐Monteiro

Berini

et al. 2022

Optical Sensing and Detection VII

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During the COVID-19 outbreak, PCR tests were widely used for large-scale testing and screening.Yet, this technique requires bulky and time-consuming procedures to prepare the samples collected from the patients before their analysis by well-trained experts with expensive and specific equipment. PCR is therefore not competitive as a technique of detection for a widespread and rapid use in point-of-care sites. Thus, the COVID-19 pandemic highlighted the need for cheap and easy-to-implement biosensors. Surface plasmon resonance based sensors were suggested as a promising alternative in recent years. Indeed, they enable real-time and label-free detection of a wide range of analytes. That explains their widespread use in various fields of applications such as pharmacology, toxicology, food safety, and diagnosis. This thesis proposes and demonstrates a new plasmonic configuration of detection, which can address challenges posed by point-of-care settings. The gratings used as transducers in this configuration were fabricated based on laser interference lithography combined with a nanoimprinting process. The responses of these nanostructures interrogated by a p-polarized light beam result in a transfer of energy between two diffracted orders over an angular scan. This optical phenomenon termed as "optical switch", was theoretically and experimentally investigated and optimized.The principle of detection based on this specific configuration was demonstrated for the detection of small variations in the bulk refractive index with solutions comprised of different ratios v Abstract of de-ionized water and glycerol. A limit of detection in the range of 10 −6 RIU was achieved.In addition, preliminary bio-assays obtained by combining this configuration with a functionalization are presented and demonstrate the selectivity and the potential of this new plasmonic configuration for biosensing applications. This thesis work paves the way for the use of the optical switch configuration as a biosensor aligned with low-cost manufacturing and relevant for diagnosing in point-of-care sites. vi List of Figures 1.4 Sketches of the sequential steps for an ELISA assay consisting in detecting and quantifying gentamicin (red Y). A solution with a high gentamicin concentration results in a clearer solution than a solution with a low gentamicin concentration. That manifests through a lower (resp. higher) absorbance for high (resp. low) gentamicin concentrations, as shown in Figure 1.3. These sketches are extracted from [23].

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Quantitative investigation on a period variation reduction method for the fabrication of large-area gratings using two-spherical-beam laser interference lithography

Cited by 7 publications

References 24 publications

In situ monitoring of thin alumina passive film growth by surface plasmon resonance (SPR) during an electrochemical process

In situ monitoring of thin alumina passive film growth by surface plasmon resonance (SPR) during an electrochemical process

Design of a high-resolution magneto-plasmonic biosensor for analyte detection

Development of a new plasmonic transducer for the detection of biological species

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