Quantitative phase imaging method using dual-wavelength Fourier ptychography

Choi, Guk Jong; Jeon, Sungbin; Lee, Jae Yong; Lim, Jin Sang; Jang, Seunghyun; Park, No Cheol

doi:10.1364/cosi.2017.cw3b.4

Imaging and Applied Optics 2017 (3D, AIO, COSI, IS, MATH, pcAOP) 2017

DOI: 10.1364/cosi.2017.cw3b.4

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Quantitative phase imaging method using dual-wavelength Fourier ptychography

Guk Jong Choi

Sungbin Jeon

Jae Yong Lee

et al.

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2024

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Dual-wavelength Fourier ptychographic microscopy for topographic measurement

Hao,

Lin,

et al. 2024

Opt. Express

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Topographic measurements of micro- or nanostructures are essential in cutting-edge scientific disciplines such as optical communications, metrology, and structural biology. Despite the advances in surface metrology, measuring micron-scale steps with wide field of view (FOV) and high-resolution remains difficult. This study demonstrates a dual-wavelength Fourier ptychographic microscopy for high-resolution topographic measurement across a wide FOV using an aperture scanning structure. This structure enables the capture of a three-dimensional (3D) sample's scattered field with two different wavelength lasers, thus allowing the axial measurement range growing from nano- to micro-scale with enhanced lateral resolution. To suppress the unavoidable noises and artifacts caused by temporal coherence, system vibration, etc., a total variation (TV) regularization algorithm is introduced for phase retrieval. A blazed grating with micron-scale steps is used as the sample to validate the performance of our method. The agreement between the high-resolution reconstructed topography with our method and that with atomic force microscopy verified the effectiveness. Meanwhile, numerical simulations suggest that the method has the potential to characterize samples with high aspect-ratio steps.

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Dual-wavelength Fourier ptychographic microscopy for topographic measurement

Hao,

Lin,

et al. 2024

Opt. Express

View full text Add to dashboard Cite

show abstract

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Quantitative phase imaging method using dual-wavelength Fourier ptychography

Cited by 1 publication

References 6 publications

Dual-wavelength Fourier ptychographic microscopy for topographic measurement

Dual-wavelength Fourier ptychographic microscopy for topographic measurement

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