Quantitative X-ray wavefront measurements of Fresnel zone plate and K-B mirrors using phase retrieval

Abstract

A scanning coherent diffraction imaging method was used to reconstruct the X-ray wavefronts produced by a Fresnel zone plate (FZP) and by Kirkpatrick-Baez (KB) focusing mirrors. The ptychographical measurement was conducted repeatedly by placing a lithographed test sample at different defocused planes. The wavefronts, recovered by phase-retrieval at well-separated planes, show good consistency with numerical propagation results, which provides a self-verification. The validity of the obtained FZP wavefront was further confirmed with theoretical predictions.

Design and performance of a scanning ptychography microscope

“…Ptychography has been used to provide X-ray wavefront measurements from Kirkpatrick-Baez (KB) mirrors, 14 nanofocusing (refractive) lenses, 15 kinoform lenses, 16 multilayer Laue lenses, 17 and Fresnel X-ray Zone Plate (ZP). 18,22 Moreover, ptychography has been further developed to provide enhanced imaging capabilities through combining with tomography, and 16 nm spatial resolution in 3D has been recently reported. 19 Inspired by the successful application of ptychography for nanofocusing optics characterization we have designed and constructed a dedicated instrument optimized for performing ptychography measurements on MLL nanofocusing optics.…”

Semi-transparent central stop in high-resolution X-ray ptychography using Kirkpatrick–Baez focusing

“…First results using divergent beams have been reported, including nano-focusing refractive X-ray lenses (Schropp et al, 2010(Schropp et al, , 2012Hö nig et al, 2011), Fresnel zone plates (Vila-Comamala et al, 2011;Huang et al, 2012;Wilke et al, 2012) and Kirkpatrick-Baez (KB) mirrors Takahashi et al, 2011Takahashi et al, , 2013Huang et al, 2012;Giewekemeyer et al, 2013). KB mirrors are attractive focusing devices due to their high efficiency at sub-100 nm focusing while providing long working distances of hundreds of millimetres (Hignette et al, 2005;Matsuyama et al, 2006;Mimura et al, 2007Mimura et al, , 2010Mimura et al, , 2011.…”

11 nm hard X-ray focus from a large-aperture multilayer Laue lens

“…Since the recovered wavefront can be numerically propagated to any plane of interest, a ptychography measurement does not need to be performed at the exact location of a focal plane, therefore relaxing the alignment complexity of a nanofocusing system. Ptychography has been proven to provide robust and reliable X-ray wavefront measurements for KB mirrors16, compound refractive lens17, kinoform lens18 and zone plate19 using synchrotron radiation, as well as X-ray free electron laser pulses20.…”