Wide-dynamic-range
NO
x
sensors are
vital for the environment and health purposes, but few sensors could
achieve wide-range detection with ultralow and ultrahigh concentrations
at the same time. In this article, the microstructured and nitrogen-hyperdoped
silicon (N-Si) for NO
x
gas sensing is
investigated systematically. Working by the change of surface conductivity,
the sensor is ultrasensitive to low concentrations of NO
x
down to 11 ppb and shows a rapid response/recovery
time of 22/33 s for 80 ppb. When the NO
x
concentration increases and exceeds a threshold value (10â50
ppm), an nâp conduction-type transition is observed due to
the inversion of the conduction type of major carriers, which limits
the dynamic range of the sensor at high concentration. However, when
the sensor works in a photovoltaic self-powered mode under the asymmetric
light illumination, the limitation can be successfully overcome. Therefore,
with the combination of the two working principles, a wide dynamic
range stretching over 6 orders of magnitude (âŒ0.011â4000
ppm) can be achieved.