Jpn. J. Appl. Phys.
 1994
DOI: 10.1143/jjap.33.419
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Quarter-Micron Contact Hole Filling by Ionized Beam Deposition

Hiroki Ito
1
,
Naoyuki Kajita
2
,
Masahiro Hanai
3
et al.

Abstract: The theory for acoustic gravity modons is generalized. As a result, the equations governing the whole internal gravity wave branch are deduced. The threshold modon velocity is also found.

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