Quasi-monodisperse β-SiC nanospheres: Synthesis and application in chemical-mechanical polishing

Zhang, Meng

doi:10.1016/j.jpcs.2016.11.026

Cited by 14 publications

(1 citation statement)

References 29 publications

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“…As can be seen from the figure, the crystal structure of the resulting β-SiC was unaffected by heating time. A small peak (2θ = 33.6°) ahead of the highest intensity peak is assumed to be due to high-intensity stacking faults on the (111) plane in β-SiC, marked with (◆) [ 22 , 36 , 37 ].…”

Section: Resultsmentioning

confidence: 99%

Ultrarapid Multimode Microwave Synthesis of Nano/Submicron β-SiC

Min

Johnson

et al. 2018

Materials

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This paper presents the design, development and realization of a fast and novel process for the synthesis of 3C silicon carbide (β-SiC) nanorods and submicron powder. Using SiO2 (or Si) and activated carbon (AC), this process allows β-SiC to be synthesized with almost 100% purity in timeframes of seconds or minutes using multimode microwave rotary tube reactors under open-air conditions. The synthesis temperature used was 1460 ± 50 °C for Si + AC and 1660 ± 50 °C for SiO2 + AC. The shortest β-SiC synthesis time achieved was about 20 s for Si + AC and 100 s for SiO2 + AC. This novel synthesis method allows for scaled-up flow processes in the rapid industrial-scale production of β-SiC, having advantages of time/energy saving and carbon dioxide emission reduction over comparable modern processes.

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Section: Resultsmentioning

confidence: 99%