R.f. magnetron sputtered iridium coatings on carbon structural materials

Chemical vapour deposition of Ir-based coatings: chemistry, processes and applications

“…Electro-chemical deposition, magnetron sputtering, and metal-organic chemical vapor deposition (MOCVD) processes have been successfully used for the deposition of Ir coatings. [3][4][5] CVD is one of the most dynamically developing methods of forming metal layers for different purposes. Compared with the coatings prepared by electrodeposition and magnetron sputtering, the coatings deposited by MOCVD have smaller grain size and different grain structure.…”

“…4,[19][20][21][22][23] Obvious advantages of sputtered thin lms are simplicity of the method and material purity as well as capability to form metal silicides being deposited on silicon and thermally annealed. It seems that only sputtered lms can serve as a reference for comparison of CVD thin lm composition and properties.…”

Optical constants and roughness study of dc magnetron sputtered iridium films

“…[1][2][3]11 Due to the strong influence of morphology on film properties, film microstructure is an important property to consider for both optical and microelectronic applications. Moreover, environmental stability depends strongly on film morphology as well.…”

“…1,2 Ir is of great interest because of its unique properties, including a high melting point (ϳ2713 K), low oxygen permeability, high chemical stability, and good electric conductivity, to name a few. [1][2][3][4] As a result, it is currently being considered by NASA as a substrate ͑Ir on fused silica͒ for use in space contamination studies. 5,6 For use in space, Ir films with excellent surface qualities are necessary, including extremely low surface roughness and superb stability in the adverse environment in space.…”

Optical modeling of iridium thin film erosion under oxygen plasma exposure

“…Among candidate materials, iridium seems promising because of its unique properties, including smooth surfaces, high melting point ͑ϳ2713 K͒, low vapor pressure, low oxygen permeability, and high chemical stability, to name a few. [4][5][6][7] For use in space, the substrate itself has to have superb stability in the adverse environment in space.…”