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M’Closkey, Robert T.; Vakakis, A. F.; Gutierrez, Roman C.

doi:10.1023/a:1012934112137

Cited by 31 publications

(7 citation statements)

References 14 publications

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“…MEMS gyroscopes are projected to be a great success as accelerometers before, which push many researchers to dedicate many efforts to develop more miniature, more robust and better performance devices. In the past decades, together with improved mechanical structure design [1][2][3][4][5][6], low noise readout circuits [7][8][9] and reformative microfabrication [10], the control system [11][12][13][14][15][16][17][18] for MEMS gyroscopes put much more emphasis than ever before to make the gyroscopes possess better sensor performance and the adaptability for environmental parameters' variation.…”

Section: Introductionmentioning

confidence: 99%

“…AGC is a kind of control strategy that employs the nonlinear function to regulate the difference between the actual signal and the desired one to the minimum. Many literatures have reported adopting the AGC circuit to control the gyroscope [11][12][13][14][15][16][17][18]. In [11], a digital AGC and proportion-integral (PI) controller with switching capacitors technology are used to fulfill the closed-loop control task, which gives the discrete time model by z-transformation.…”

Section: Introductionmentioning

confidence: 99%

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Transient response and stability of the AGC-PI closed-loop controlled MEMS vibratory gyroscopes

Cui¹,

Z²,

Ding³

et al. 2009

J. Micromech. Microeng.

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This paper presents a detailed study on the transient response and stability of the automatic gain control (AGC) with a proportion-integral (PI) controller for a MEMS vibratory gyroscope, which constructs a closed-loop control system to make the gyroscope achieve a constant amplitude vibration at its resonant frequency. The nonlinear mathematical model for the control system is established by applying the averaging and linearization method, which is evaluated through numerical simulations. The stability and convergence characteristics of the whole loop are investigated by using the phase plane method and Routh–Hurwitz criterion. The analysis provides a quantitative methodology for selecting the system parameters to approach stability and an optimal transient response. The negative impact induced by drift of the resonant frequency and Q-factor is also discussed. Simulation results predicted by the model are shown to be in close agreement with the experimental results carried out on a doubly decoupled bulk micromachined gyroscope. By optimizing the control parameters, the measured rising time is less than 100 ms without obvious overshoot. The setting time of the whole loop is less than 200 ms with the relative fluctuation of velocity amplitude within approximately 16 ppm for an hour. The resulting overall performance of the gyroscope is tested under atmospheric pressure. The resonant frequencies and the Q-factor of the drive mode and sense mode are 2.986 kHz, 213 and 3.199 kHz, 233, respectively. The gyroscope achieves a scale factor of 27.6 mV/deg/s with nonlinearity less than 120 ppm in the full-scale range of 800° s−1. The threshold of sensitivity is measured to be about 0.005° s−1 with noise equivalent angular rate evaluated to be 0.001°/s/Hz1/2.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Transient response and stability of the AGC-PI closed-loop controlled MEMS vibratory gyroscopes

Cui¹,

Z²,

Ding³

et al. 2009

J. Micromech. Microeng.

View full text Add to dashboard Cite

show abstract

“…The study of a MEMS gyroscope that employs modern micromachining technologies has attracted the attention of many researchers for developing small and robust sensors from various aspects [1,14,[24][25][26][27]. Together with the advancement of gyroscope structure design, fabrication and dynamics control, it is of great interest to attain consistent and repeatable sensor performance in robustness to the parameter variations of electromechanical systems.…”

Section: Introductionmentioning

confidence: 99%

“…The AGC is a kind of control scheme that is widely used to obtain dynamic equilibrium under system gain uncertainty existing in various applications, such as communication systems [2,3], analog circuit designs [4][5][6], audio [7], video [8] and physical application [9]. Moreover, much effort associated with the research on the AGC loop for a MEMS gyroscope has been made as reported in [10][11][12][13][14][15]. Most of the work adapted the conventional AGC mechanism for the customized purpose relying on each system's characteristics, but they do not possess a systematic design procedure for the oscillation dynamics control-particularly, for controlling the error response of the vibration signal laid in the frequency range of interest.…”

Section: Introductionmentioning

confidence: 99%

“…However, the attained velocity regulation was not verified by a practical gyroscope device, and a relatively complicated hybrid system analysis containing both continuous and discrete components was developed on the basis of an approximated linear perturbed model. The work in [13][14][15] successively provided a concrete theoretical background in employing the AGC scheme for gyroscope oscillation control. In the work, perturbation analysis using periodic averaging led to simplified nonlinear equations and the relevant AGC control parameters were determined by checking mode localization conditions.…”

Section: Introductionmentioning

confidence: 99%

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Development of a lateral velocity-controlled MEMS vibratory gyroscope and its performance test

Sung

Lee

et al. 2008

J. Micromech. Microeng.

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The objective of this paper is to present a velocity-controlled vibratory MEMS gyroscope that achieves consistent output characteristics in the lateral driving dynamics of the system. Through a systematic automatic gain control loop design process, the driving mode dynamics of the gyroscope is first transformed to take account of the velocity envelope; a reference tracking integral control is then employed. For stabilized loop construction, a mathematical development and stability analysis of the feedback loop is presented, which is followed by numerical simulation using practical sensor parameters. The mechanical structure was fabricated using the conventional deep reactive ion etching process and the anodic wafer bonding method. Vacuum-packaged devices were used for the resonant gyroscope operation. An essential fabrication process for realizing the electrical connection through a thick glass substrate was possible by applying a sandblasting process and spin coating process of conductive epoxy. Finally, loop simulation and experimental results verified that the amplitude-controlled property in the driving loop is preserved under the system parameter variation which resulted in enhanced gyroscope output performance in comparison with other driving schemes.

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Self‐oscillation loop design and measurement for an MEMS resonant accelerometer

Liu

2012

Adaptive Control & Signal

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This paper provides detailed information about the dynamic model and closed-loop control theory of resonant accelerometer based on electrostatic stiffness. After the resonant accelerometer principle based on electrostatic stiffness has been analyzed, a dynamic model was built. According to the requirement of constant stable vibration amplitude for a different applied acceleration, control equations based on selfsustained oscillation loop technology were also developed for the whole system. By applying the averaging method, the system behaviors were analyzed, and equilibria for the vibration amplitude were achieved. Theoretical analysis and simulation showed that the vibration amplitude became stable and attractive only when the stable criterion was satisfied. Using a PI controller, constant level vibrating amplitude can be achieved when the input acceleration changes. A resonant accelerometer was fabricated using bulk-silicon dissolved process. Under the aforementioned conditions, the accelerometer was driven and tested using a self-sustained oscillation loop. When the sensing voltage was 5 V, the sensitivity was 58 Hz/g, and the resolution was 3.5 mg for a single vibrating beam.

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Untitled

Cited by 31 publications

References 14 publications

Transient response and stability of the AGC-PI closed-loop controlled MEMS vibratory gyroscopes

Transient response and stability of the AGC-PI closed-loop controlled MEMS vibratory gyroscopes

Development of a lateral velocity-controlled MEMS vibratory gyroscope and its performance test

Self‐oscillation loop design and measurement for an MEMS resonant accelerometer

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