2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics 2008
DOI: 10.1109/omems.2008.4607887
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Radiation heat transfer dominated microbolometers

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Cited by 5 publications
(10 citation statements)
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“…[ 160 , 161 ] Additionally, various components have been integrated into the composition of microbolometers in order to add elements of spectral sensitivity. For example, narrow antenna coupling, [ 162 ] metal grids, [ 163 ] and SiO 2 absorbing fi lms [ 164 ] are all techniques that have been utilized.…”
Section: Detection and Sensingmentioning
confidence: 99%
“…[ 160 , 161 ] Additionally, various components have been integrated into the composition of microbolometers in order to add elements of spectral sensitivity. For example, narrow antenna coupling, [ 162 ] metal grids, [ 163 ] and SiO 2 absorbing fi lms [ 164 ] are all techniques that have been utilized.…”
Section: Detection and Sensingmentioning
confidence: 99%
“…This arises from the reduced thermal conductance, which has been measured in recent thin film devices. 20 The effects of photon emission and absorption on the energy fluctuations are the same by Kirchoff 's Law, and the similarity applies for light of any particular wavelength range, polarization or direction.…”
Section: Radiation Noisementioning
confidence: 95%
“…The simulation shows an absorption of greater than 50% in the 8-14 mm range. The simulation is done using the 232 matrix technique from Yeh 20 and optical constants from Palik.…”
Section: Broadband Thermal Detector Technology Flat Spectrummentioning
confidence: 99%
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“…This can include both phonon fluctuations through the support structure and photon fluctuations through emission and absorption in the plate. While historically thermal conductance noise has been dominated by conduction through the legs, recent work has shown that with proper engineering, bolometers can be fabricated for which radiation is the principal thermal conductance path [12].…”
Section: Practical Device Designmentioning
confidence: 99%