“…In both cases, average nanocluster size decreases while number density increases with dose above 1 dpa. The inverse relationship between size and number density has been observed elsewhere in literature [72,84,88,101], and is akin to inverse Ostwald ripening, which has been previously described in the context of ion beaminduced size refinement of embedded metallic nanoparticles [58,75,77,78,205], an emerging research area in nanoelectronics. Through inverse Ostwald ripening, smaller nanoclusters nucleate and grow at the expense of larger nanoclusters, due to the competing mechanisms of ballistic dissolution and diffusion-driven nanocluster growth, with the net result being a reduced average cluster size and increased number density.…”